无机材料学报2025，Vol.40Issue(9)：P.1029-1036,I0003,9.DOI:10.15541/jim20240433
Rare Earth Oxide Surface Modification of Porous SiO_(2) Film Prepared by Atomic Layer Deposition
JIN Jianfei 1LÜLin 2LI Ying 2YAN Lu 2CAO Yunzhen 2LI Wei3
作者信息
- 1. Key Laboratory of Inorganic Coating Materials CAS,Shanghai Institute of Ceramics,Chinese Academy of Sciences,Shanghai 200050,China School of Materials and Chemistry,University of Shanghai for Science and Technology,Shanghai 200093,China
- 2. Key Laboratory of Inorganic Coating Materials CAS,Shanghai Institute of Ceramics,Chinese Academy of Sciences,Shanghai 200050,China
- 3. School of Materials and Chemistry,University of Shanghai for Science and Technology,Shanghai 200093,China
- 折叠
摘要
关键词
porous SiO_(2)/rare earth oxide/atomic layer deposition/anti-reflective/self-cleaning分类
通用工业技术引用本文复制引用
JIN Jianfei,LÜLin,LI Ying,YAN Lu,CAO Yunzhen,LI Wei..Rare Earth Oxide Surface Modification of Porous SiO_(2) Film Prepared by Atomic Layer Deposition[J].无机材料学报,2025,40(9):P.1029-1036,I0003,9.
