机电工程技术2025，Vol.54Issue(19)：30-34,5.DOI:10.3969/j.issn.1009-9492.2024.00194
异型微谐振梁振动特性分析
Analysis of Vibration Characteristics for Special Type Micro Resonant Beam
摘要
Abstract
Vibration element is the core component of resonant sensor,which plays a crucial role in the performance of sensor in practical applications.The calculation of mechanical parameters is very important in the design of resonant beam.For resonant beams with regular shapes,the calculation methods for their mechanical parameters are relatively well-established.However,for resonant beams with irregular shapes,the calculation of mechanical parameters is much more complex and challenging.Therefore,a vibration element with special micro beam structure is proposed,and a silicon-based micro resonator sample is fabricated using photolithography technology.Based on the actual structural features of the sample fixed at both ends with extended side wings in the middle,a vibration differential equation considering air damping is constructed.The vibration differential equation of the resonator is solved using the Laplace transform and its inverse transform method.Under the conditions of considering air damping and no air damping,the natural frequencies of each order of the special resonant beam are calculated separately.The modal function and generalized coordinate function of the model are obtained,and the attenuation vibration images are drawn.A method is proposed to solve the natural frequency of the special micro resonant beam,and the dynamic displacement diagrams of various points on the special micro resonant beam are plotted over time.The results have certain guiding significance for the vibration research of micro resonant beams with concentrated mass in the middle.关键词
谐振梁/空气阻尼/固有频率/动态位移Key words
micro resonant beam/air damping/natural frequency/dynamic displacement分类
机械制造引用本文复制引用
韩光,李智,刘锐军..异型微谐振梁振动特性分析[J].机电工程技术,2025,54(19):30-34,5.基金项目
河北省高等学校科学技术研究项目(QN2024251,QN2024265) （QN2024251,QN2024265）
河北建材职业技术学院重点项目(YZ24002) （YZ24002）
