轻工机械2025，Vol.43Issue(5)：68-76,9.DOI:10.3969/j.issn.1005-2895.2025.05.009
溢流法熔制低厚度偏差LTPS/OLED玻璃的关键技术
Key Technologies for Melting Low Thickness Deviation LTPS/OLED Glass by Overflow Method
苏记华 1苏鹏志 1贾礼礼 1李清源1
作者信息
- 1. 郑州旭飞光电科技有限公司,河南 郑州 450016
- 折叠
摘要
Abstract
Aiming at the problem of controlling the thickness deviation of LTPS/OLED glass substrates,the influence mechanisms of the properties of molten glass,the structure of the overflow brick,the temperature field and the drawing process on the thickness uniformity in the overflow down-drawing method were studied.An integrated scheme for regulating melt properties,optimizing the structure of overflow bricks,precisely controlling the temperature field and strengthening tensile stability was proposed.The pilot test results show that the standard deviation of the optimized glass substrate thickness has decreased from 2.8 μm to 0.9 μm,with a maximum thickness deviation within±2.0 μm and a Process Capability Index(CPK)of 1.58.This provides a technical paradigm for the manufacturing of ultra-low thickness deviation display glass and promotes the autonomy of domestic high-end substrates.关键词
玻璃熔制/溢流下拉法/低温多晶硅/有机发光二极管/厚度偏差Key words
glass melting/overflow downward method/LTPS(Low Temperature Poly-Silicon)/OLED(Organic Light-Emitting Diode)/thickness deviation分类
信息技术与安全科学引用本文复制引用
苏记华,苏鹏志,贾礼礼,李清源..溢流法熔制低厚度偏差LTPS/OLED玻璃的关键技术[J].轻工机械,2025,43(5):68-76,9.
