液晶与显示2025，Vol.40Issue(10)：1450-1457,8.DOI:10.37188/CJLCD.2025-0147
TFT基板创新遮光维修及参数优化分析
Innovative shading maintenance and parameter optimization analysis of TFT substrate
谈思云 1何彬 1胡延雨 1蒋腾腾 1张小松 1李登涛 1刘浩然1
作者信息
- 1. 合肥京东方显示技术有限公司,安徽 合肥 230012
- 折叠
摘要
Abstract
In order to solve the issue of certain specific bright spot defects on TFT substrates,which occur at a rate of approximately 0.23%and cannot be repaired,a method of coating bright spot pixels with UV curable black shading material is proposed.This method can be used to repair all bright spot defects,and the ability to repair the substrate by darkening the pixels is fully enhanced.Firstly,a series of experiments including lighting detection,microscopic observation,and focused ion beam(FIB)analysis were conducted to verify the feasibility of light shielding material coating bright spot pixels to achieve pixel darkening.Then,through experimental exploration,it was found that the important control parameters for achieving pixel dimming are shading rate and coating height.The effects of three factors,infrared intensity,infrared exposure time and discharge pressure,on shading rate and coating height were investigated.Finally,the response surface method was introduced to construct a response prediction model corresponding to shading rate and coating height,which was validated with experimental data.The optimal process parameters of three factors were analyzed to be 87.9%,2 488 ms,and 0.015 8 MPa.According to the experimental results,the success rate of repairing bright spot defects on TFT substrates caused by different factors is 98%in the mass production.关键词
TFT基板/暗点化维修/物理遮光/红外加热/响应面法Key words
TFT substrate/darkening point maintenance/physical shading/infrared heating/response surface method分类
信息技术与安全科学引用本文复制引用
谈思云,何彬,胡延雨,蒋腾腾,张小松,李登涛,刘浩然..TFT基板创新遮光维修及参数优化分析[J].液晶与显示,2025,40(10):1450-1457,8.
