传感技术学报2025，Vol.38Issue(9)：1533-1539,7.DOI:10.3969/j.issn.1004-1699.2025.09.001
MEMS气体传感器发展现状与对策
Development Status and Strategy of MEMS Gas Sensors
摘要
Abstract
The new-type MEMS gas sensor has been widely used due to the advantages of low power consumption,small size,high sensi-tivity,good selectivity,and high integration.With the rapid development of the Internet of Things,MEMS technology,and artificial intel-ligence,artificial olfactory technology constructed by using MEMS gas sensing array and artificial intelligence algorithm plays an impor-tant role in more fields,realizing the development route of the gas sensor from"function realization"and further to"performance im-provement"to"intelligence".The current research status of MEMS gas sensors is described from the aspects of types,gas sensing ma-terials,sensing mechanisms,and applications,the existing problems of MEMS gas sensors are focused on,and the future development di-rection and corresponding countermeasures are put forward.关键词
MEMS气体传感器/微热板/传感器微结构原理/策略Key words
MEMS gas sensor/microheater/sensor microstructure mechanism/strategy分类
信息技术与安全科学引用本文复制引用
苏铮,邢志鹏,钟一红,许梦雪,孙旭辉..MEMS气体传感器发展现状与对策[J].传感技术学报,2025,38(9):1533-1539,7.基金项目
苏州市科技发展计划项目(SYC2022141) （SYC2022141）
