表面技术2025，Vol.54Issue(20)：44-69,26.DOI:10.16490/j.cnki.issn.1001-3660.2025.20.004
CVD多晶金刚石膜的生长技术与热导率优化研究进展
Research Progress on Growth Technology and Thermal Conductivity Optimization of CVD Polycrystalline Diamond Films
摘要
Abstract
The work aims to systematically review the research progress of chemical vapor deposition(CVD)technology in the field of large-size growth preparation,thermal conductivity mechanism exploration and process optimization of polycrystalline diamond films,with a particular focus on the breakthroughs in large-size preparation technology and the in-depth exploration of thermal performance regulation mechanisms.By conducting a comprehensive and systematic comparison of the process characteristics,film properties and application differences of mainstream technologies,including hot filament chemical vapor deposition(HFCVD),microwave plasma chemical vapor deposition(MPCVD),direct current hot cathode chemical vapor deposition(DC-HC CVD)and direct current arc plasma jet chemical vapor deposition(DC arc jet CVD),the unique advantages and inherent limitations of each technology in the preparation of large-size diamond films,as well as their distinct application scenarios in thermal management,are revealed.It is emphasized that to realize the industrial-scale preparation of large-size polycrystalline diamond films,it is imperative to synergistically advance innovations in reactor structure,optimize plasma excitation modes,and achieve coordinated regulation of multiple process parameters.Such integrated efforts are crucial to meet the increasingly stringent performance requirements of high-power electronic devices for diamond thermal management materials,ultimately enabling efficient and uniform deposition of large-size,high-quality diamond films.In the aspect of thermal conductivity optimization,the intricate effect mechanisms of grain size,film thickness,crystal orientation and residual stress on thermal conductivity,as well as the strategies to precisely control thermal conductivity through process regulation,are systematically analyzed.Specifically,by optimizing the matching relationship between grain size and film thickness,the scattering effect of grain boundary density on phonon transmission is significantly mitigated,thereby enhancing the overall heat transport efficiency.Among the various process parameters,the precise control of carbon source concentration,temperature and power pressure exerts a decisive impact on grain morphology and crystal quality.Moreover,promoting the preferential growth of specific crystal plane orientations can further strengthen the thermal conductivity advantage.Innovative approaches such as dynamic magnetic field assistance and group ratio regulation offer new pathways for achieving oriented growth of crystal planes.Additionally,the residual stress issue requires comprehensive alleviation through strategies like substrate selection,interface pretreatment and structural design,aiming to reduce the negative impact of lattice distortion on thermal performance.The research results reviewed in this work not only construct a systematic theoretical framework for the development of high-performance diamond thermal management materials,but also provide practical technical references for the heat dissipation design of high-power electronic devices.By deeply analyzing key scientific issues such as equipment optimization and the thermal conductivity regulation mechanism of diamond materials,a solid theoretical foundation is laid for material process optimization,equipment structure design and performance prediction,helping researchers more accurately grasp the direction and path of material development.These findings can directly present the research and development of heat dissipation systems for high-power electronic devices,aiding in solving the overheating problem of devices under high-power operation,and thus hold great significance for improving the stability of electronic equipment,prolonging their service life and promoting the technological upgrading of related industries.关键词
多晶金刚石膜/化学气相沉积/热导率/热管理Key words
polycrystalline diamond films/chemical vapor deposition/thermal conductivity/thermal management引用本文复制引用
王子昂,张晓宇,王英楠,韩赛斌,彭燕,徐明升,徐现刚,胡秀飞,葛磊..CVD多晶金刚石膜的生长技术与热导率优化研究进展[J].表面技术,2025,54(20):44-69,26.基金项目
国家自然科学基金(U23A20569,62305189) （U23A20569,62305189）
山东省自然科学基金(ZR2023ZD04,ZR2022QF129) （ZR2023ZD04,ZR2022QF129）
山东省重点研发(2022ZLGX02) （2022ZLGX02）
山东省高等学校青创科技支持计划(2022KJ032)National Natural Science Foundation of China(U23A20569,62305189) （2022KJ032）
Shandong Provincial Natural Science Foundation(ZR2023ZD04,ZR2022QF129) （ZR2023ZD04,ZR2022QF129）
Key R&D Program of Shandong Province,China(2022ZLGX02) （2022ZLGX02）
Shandong College Youth Science and Technology Support Program(2022KJ032) （2022KJ032）
