传感技术学报2025，Vol.38Issue(10)：1751-1759,9.DOI:10.3969/j.issn.1004-1699.2025.10.004
基于沟槽双层结构的超高灵敏宽量程柔性应变传感器
Ultra-High Sensitive and Wide-Measuring-Range Flexible Strain Sensor Based on a Trench Bilayer Structure
摘要
Abstract
Flexible strain sensors are widely employed in health monitoring and human-machine interaction due to their ease of deforma-tion,strong adaptability to the environment and high precision.A trench bilayer flexible strain sensor comprised of an upper tin-bismuth thin film and Ecoflex/graphene composite is introduced.The design of bilayer structure enables the sensor to achieve"dual channel"detection when stretched,resulting in an ultra-high sensitivity and a wide measuring range.The experiment results show that increased trench depth and width can lead to local stress concentration,resulting in more cracks,increasing the resistance change,and significantly improving the sensor's sensitivity.Additionally,the sensitivity is also influenced by the quantity of trenches,increasing within a certain range as the number of trenches rises.The sensor has potential in monitoring human movements,from tiny breathing to large-scale wrist and knee bending,demonstrating excellent performance.关键词
柔性应变传感器/沟槽双层结构/裂纹/超高灵敏/宽检测量程Key words
flexible strain sensor/trench bilayer structure/cracks/ultra-high sensitivity/wide measuring range分类
计算机与自动化引用本文复制引用
詹政,孙权,吴化平,鹿业波..基于沟槽双层结构的超高灵敏宽量程柔性应变传感器[J].传感技术学报,2025,38(10):1751-1759,9.基金项目
国家自然科学基金项目(62374074) （62374074）
嘉兴市科技计划项目(2021AY10061) （2021AY10061）
