光学精密工程2025，Vol.33Issue(17)：2661-2690,30.DOI:10.37188/OPE.20253317.2661
极紫外光学元件全频段面形误差检测与缺陷探测技术研究进展
Research progress of full-spatial frequency error measurement and defect detection technology for extreme ultraviolet optical components
摘要
Abstract
Extreme ultraviolet lithography,a pivotal technology in semiconductor manufacturing,imposes atomic-scale precision requirements on optical surfaces and necessitates negligible surface and subsurface damage.This paper addresses ultra-precision fabrication of optical components by first elucidating the mechanisms by which material properties and manufacturing processes induce surface errors.Technical challenges and recent advances in measuring surface errors across spatial scales are then analyzed.For low-spatial-frequency figure errors,emphasis is placed on absolute measurement methods and sub-aperture stitching techniques.For mid-to high-spatial-frequency roughness,developments in white-light interferom-etry microscopy,atomic force microscopy,and super-resolution white-light interferometry are reviewed.To meet multi-modal characterization requirements for surface and subsurface defects,the advantages and limitations of complementary detection methods-including electron microscopy,interferometry,scanning probe techniques,and scattering approaches-are comparatively assessed.Finally,against the backdrop of prevailing technical bottlenecks and the demand for high-performance optics,future directions are delineat-ed,highlighting intelligent measurement systems,multi-physical coupled characterization,and in-situ monitoring.This analysis is intended to serve as a technical reference to support domestic production of critical equipment components.关键词
先进光学制造/光学测量/面形检测/粗糙度检测/缺陷检测Key words
advanced optical manufacturing/optical measurement/surface metrology/surface roughness measurement/defect measurement分类
信息技术与安全科学引用本文复制引用
李佳慧,匡翠方,徐月暑,卞殷旭,梁佳栋,崔玉栋,刘旭..极紫外光学元件全频段面形误差检测与缺陷探测技术研究进展[J].光学精密工程,2025,33(17):2661-2690,30.基金项目
国家重点研发计划资助项目(No.2023YFF722702) （No.2023YFF722702）
中国博士后科学基金面上资助项目(No.2025M770817) （No.2025M770817）
