光学精密工程2025，Vol.33Issue(17)：2754-2764,11.DOI:10.37188/OPE.20253317.2754
超声辅助机器人抛光硫化锌材料去除机理及工艺优化
Material removal mechanism and process optimization of ultrasonic-assisted robot polishing for zinc sulfide
摘要
Abstract
To achieve high-quality polishing of zinc sulfide optical components,this study develops a theo-retical and experimental framework for robotic ultrasonic-assisted polishing,with the aim of establishing a high-precision,high-efficiency polishing theory and process tailored to zinc sulfide.A contact model be-tween abrasive grains and the workpiece during robotic ultrasonic-assisted polishing is first established,and the three-dimensional trajectory of abrasive grains under ultrasonic vibration is characterized through ki-nematic analysis.Based on Preston's material removal theory,the material removal function is modified by introducing a dynamic pressure term and a relative velocity term induced by ultrasonic vibration,there-by constructing a zinc sulfide material removal model that accounts for high-frequency vibration effects.Ul-trasonic-assisted stagnation-point polishing experiments are performed to determine the effects of polishing pre-pressure and spindle speed on material removal depth and removal rate for zinc sulfide,and the modi-fied removal function is validated against experimental data.Finally,using the modified removal function and optimized process parameters,comparative experiments between ultrasonic-assisted and conventional robotic polishing of zinc sulfide flats are conducted.Surface form accuracy and surface roughness before and after polishing are quantified by white-light interferometry and profilometry.Results indicate that ro-botic ultrasonic-assisted polishing yields improvements in both form and roughness relative to non-ultrason-ic-assisted polishing:the surface roughness Sa decreases from 2.632 nm to 1.782 nm,and the form error PV decreases from 0.206λ to 0.149λ(λ=632.8 nm).These findings demonstrate that robotic ultrasonic-assisted polishing,through the synergistic effects of ultrasonic vibration and optimized polishing trajectory,provides superior polishing performance for high-quality processing of zinc sulfide.关键词
机器人抛光/超声辅助抛光/硫化锌/去除函数/表面质量Key words
robot polishing/ultrasonic-assisted polishing/zinc sulfide/remove function/surface quality分类
计算机与自动化引用本文复制引用
王志,朱德清,王雪,罗皓麒,臧艺凯,刘浩然,马善意,肖峻峰,张建国..超声辅助机器人抛光硫化锌材料去除机理及工艺优化[J].光学精密工程,2025,33(17):2754-2764,11.基金项目
国防基础科研资助项目(No.JCKY2023205B002) （No.JCKY2023205B002）
