光学精密工程2025，Vol.33Issue(18)：2868-2881,14.DOI:10.37188/OPE.20253318.2868
多光谱硫化锌高表面质量CMP工艺参数优化研究
Optimization of process parameters of multi-spectral ZnS CMP with high surface quality
摘要
Abstract
In order to solve the problem that it was difficult to obtain high surface quality of multi-spectral ZnS in chemical-mechanical polishing(CMP),this paper focused on the synergistic optimization of flat-ness and surface roughness to carry out experimental research.Through single-factor experiments,the op-timal values and ranges for polishing time,abrasive type,rotational speed of the polishing disc,and polish-ing pressure were determined.Subsequently,response surface methodology was employed to design the experimental framework,and grey relational analysis was introduced to investigate the influence of these parameters and their interactions on surface morphology.The results show that the speed of polishing disk is the dominant factor affecting the surface quality,followed by polishing pressure and grain size.The opti-mum process parameters were determined by model optimization:abrasive grain size of 0.5 μm,polishing disc speed of 55 r/min,and polishing pressure of 16 N.Under these conditions,the process was validat-ed,and the surface flatness of the workpiece reached 112.49 nm,the roughness was reduced to 1.11 nm,and the surface morphology was uniform with fewer defects.The synergistic control of high precision and high quality of multi-spectral ZnS surfaces can be achieved by optimizing the CMP process parameters,providing technical support for its application in high-performance optical devices.关键词
多光谱硫化锌/化学机械抛光/响应曲面法/高表面质量/灰色关联度分析法Key words
multi-spectral ZnS/Chemical Mechanical Polishing(CMP)/response surface method/high surface quality/grey relational analysis分类
信息技术与安全科学引用本文复制引用
任佳曈,秦琳,朱蓓蓓,蔡根,楚建宁,张楚鹏,陈肖..多光谱硫化锌高表面质量CMP工艺参数优化研究[J].光学精密工程,2025,33(18):2868-2881,14.基金项目
硬脆光学元件激光辅助超精密加工机理与工艺(No.IMETKF2023008) （No.IMETKF2023008）
现代制造质量工程湖北省重点实验室开放基金资助(No.KFJJ-2022006) （No.KFJJ-2022006）
博士科研启动基金(No.XJ2024001101) （No.XJ2024001101）
