光学精密工程2025，Vol.33Issue(18)：2882-2898,17.DOI:10.37188/OPE.20253318.2882
多频磁场耦合的绝对式时栅角位移传感器
Study of absolute linear time-grid displacement sensor with multi-frequency magnetic field coupling
摘要
Abstract
To address the issues of large volume in the dual-channel structure of magnetic field sensors and code channel crosstalk caused by same-frequency excitation,while improving signal-to-noise ratio and mea-surement accuracy,a design scheme for an absolute time-grid angular displacement sensor with multi-fre-quency magnetic field coupling was proposed.This enabled real-time absolute angular displacement mea-surement to meet the spatial constraint measurement requirements in industrial applications.First,a theo-retical model for the transient magnetic field coupling of planar coils was established,and the magnetic field distribution characteristics of excitation coils with different shapes were analyzed.Based on the princi-ple of incremental measurement,an absolute single-channel angular displacement sensor model was con-structed;An absolute time-resolved displacement calculation scheme with mutually prime pole numbers was established.Under a dual-frequency synchronous excitation scheme of 500 kHz(coarse machine)and 1 MHz(fine machine),the high-frequency-to-low-frequency principle was utilized to resolve the contradic-tion between high signal-to-noise ratio and high resolution under high-frequency excitation signals.Through electromagnetic simulation and error analysis,the optimal coupling gap for the sensor was deter-mined to be 1.0 mm;Finally,a sensor prototype with an outer diameter of 84 mm was developed and per-formance testing was completed.Experimental results show that the sensor successfully suppresses mag-netic field crosstalk between coarse and fine code tracks while achieving miniaturization,with a maximum measurement error of±78″ across the entire measurement range.关键词
绝对位移测量/多频磁场耦合/信噪比/位移传感器Key words
absolute displacement measurement/multi-frequency magnetic field coupling/signal-to-noise ratio/displacement sensor分类
计算机与自动化引用本文复制引用
杨继森,刘邦全,易靖松,曹峻杰,罗云沛,张静..多频磁场耦合的绝对式时栅角位移传感器[J].光学精密工程,2025,33(18):2882-2898,17.基金项目
国家自然科学基金(No.52175454) （No.52175454）
重庆市自然科学基金面上项目(No.CSTB2023NSCQ-MSX0382) （No.CSTB2023NSCQ-MSX0382）
重庆市教委科学技术研究计划重点项目(No.KJZD-K202301106) （No.KJZD-K202301106）
重庆理工大学研究生创新项目(No.gzlcx20253027) （No.gzlcx20253027）
