光学精密工程2025，Vol.33Issue(19)：3058-3069,12.DOI:10.37188/OPE.20253319.3058
跨尺度微纳米三坐标测量机研制及误差分析
Development and error analysis of cross-scale micro-nano coordinate measuring machine
摘要
Abstract
To resolve the conflict between large-stroke motion and high-precision measurement,a novel cross-scale micro-nano coordinate measuring machine(CSMN-CMM)with a 100 mm×100 mm×100 mm measuring volume is presented.Unlike conventional coordinate measuring machines(CMMs),the CSMN-CMM adopts an independent metrology system layout that satisfies the Abbe principle in all three dimensions,thereby isolating the metrology system from motion-induced disturbances and eliminat-ing Abbe error.The motion architecture comprises a 3D air-bearing macro-motion stage coupled with a six-degree-of-freedom micro-motion stage;this macro-micro collaborative motion scheme improves mea-surement efficiency while enabling high-precision triggering and probing.For probing,either a high-preci-sion 3D contact probe or a resonant probe is employed,with the resonant probe capable of using micro-spheres down to 70 μm in diameter.Major error sources were addressed by developing a spatial error-com-pensation model based on coordinate transformation and by applying error-separation techniques.Measure-ment performance was assessed in accordance with ISO 10360-2,yielding a maximum permissible error(MPE)better than±(250 nm+3.6×10-6×L).Experimental results demonstrate sub-micron 3D mea-surement accuracy and the ability to measure internal features as small as 100 μm.The proposed structural design and enabling technologies represent a significant advance for high-precision 3D metrology.关键词
微纳米测量机/无阿贝误差/宏微运动系统/精密测量/误差分析Key words
micro-nano coordinate measuring machine/Abbe error-free/macro-micro motion system/precision measurement/error analysis分类
机械制造引用本文复制引用
黄强先,刘慧洁,张祖杨,李红莉,程荣俊,张连生,李瑞君..跨尺度微纳米三坐标测量机研制及误差分析[J].光学精密工程,2025,33(19):3058-3069,12.基金项目
国家重点研发计划资助项目(No.2019YFB2004900) （No.2019YFB2004900）
