光学精密工程2025，Vol.33Issue(19)：3070-3077,8.DOI:10.37188/OPE.20253319.3070
基于输入整形的单压电变形镜振动抑制
Vibration suppression of unimorph deformable mirror based on input shaping
摘要
Abstract
An input-shaping-based vibration suppression control method is proposed to mitigate mirror vi-brations of a unimorph deformable mirror during operation.The mirror's structural characteristics were an-alyzed to develop a dynamic model.The effects of input shapers on step-response characteristics(displace-ment overshoot and settling time)were then simulated.An experimental platform was constructed to vali-date the simulation results.Finally,the influence of the shaping technique on control performance was as-sessed via defocus wavefront reconstruction simulations.At a control frequency of 5 000 Hz,application of the input shaper reduced displacement overshoot from 32.1%to nearly zero and shortened settling time from 4.30 ms to 0.57 ms.In wavefront reconstruction simulations,overshoot decreased from 34%to less than 1%,while settling time improved from 3.95 ms to 0.58 ms,substantially enhancing both response speed and control accuracy.The designed input shaper is shown to effectively suppress vibrations of uni-morph deformable mirrors.关键词
单压电变形镜/输入整形/振动抑制/自适应光学系统Key words
unimorph deformable mirror/input shaping/vibration suppression/adaptive optics system分类
机械工程引用本文复制引用
李艳,葛鑫磊,张捷艇,马剑强,娄军强,马文超,杨海波..基于输入整形的单压电变形镜振动抑制[J].光学精密工程,2025,33(19):3070-3077,8.基金项目
国家自然科学基金资助项目(No.5247051023,No.U23A20618) （No.5247051023,No.U23A20618）
电磁空间安全全国重点实验室基金资助项目(No.JCKY2024240C009) （No.JCKY2024240C009）
