光学精密工程2025,Vol.33Issue(19):3078-3092,15.DOI:10.37188/OPE.20253319.3078
基于粘滑驱动原理的压电式直线-旋转运动平台
Piezoelectric linear-rotary motion stage based on stick-slip driving principle
摘要
Abstract
A linear-rotary piezoelectric motion platform based on the stick-slip driving principle was devel-oped to address the requirements of robot-assisted target puncture.The platform integrates a two-degree-of-freedom flexure mechanism with an active locking flexure mechanism to achieve coupled linear-rotary motion while effectively suppressing backward displacement.Statics were derived using the compliance matrix method and a closed-loop serial flexure model,and structural parameters were optimized via a ge-netic algorithm.Static,modal,and transient response analyses were conducted using finite element analy-sis to determine the optimized amplification ratios and to validate the effectiveness of the active locking mechanism.Experimental results indicate amplification ratios of 2.865 and 1.568 for linear and rotary mo-tions,respectively.The active locking mechanism reduced linear and rotary retraction displacements by 69.15%and 89.40%.The actuator attained a maximum linear velocity of 2 428.25 μm/s with a resolu-tion of 0.569 μm.In the rotary direction,continuous 360° rotation was achieved with a maximum speed of 58 019 μrad/s and a resolution of 14.4 μrad.The actuator exhibited low coupling between motions and high bidirectional motion consistency(≥94%),demonstrating suitability for target-puncture applications.关键词
压电驱动器/粘滑运动/精密驱动/柔度矩阵Key words
piezoelectric actuator/stick-slip motion/precision actuation/compliance matrix分类
机械制造引用本文复制引用
徐丽雯,王栋铭,陈万江,李瑞颉,肖晓晖,冯朝..基于粘滑驱动原理的压电式直线-旋转运动平台[J].光学精密工程,2025,33(19):3078-3092,15.基金项目
国家自然科学基金资助项目(No.52405034) (No.52405034)
湖北省自然科学基金资助项目(No.2024AFB126) (No.2024AFB126)
武汉市知识创新专项项目-曙光计划资助项目(No.2023010201020252) (No.2023010201020252)