天津工业大学学报2025，Vol.44Issue(5)：59-65,7.DOI:10.3969/j.issn.1671-024x.2025.05.009
具有平顶光谱响应的氮化硅阵列波导光栅
Silicon nitride arrayed waveguide grating with flat-top spectral response
摘要
Abstract
In order to apply the advantages of silicon nitride arrayed waveguide grating(AWG),such as large channel ca-pacity,low insertion loss,low crosstalk,high process tolerance,and low temperature sensitivity,to the field of optoelectronic communication for achieving functions like wavelength division multiplexing(WDM),a four-channel AWG with a flat-top spectral response for coarse wavelength division multiplexing(CWDM)was de-signed.The impact of linear mode spot converters with the asymmetric width at the output ports and the radius ra-tio of the Roland circle to the grating circle on device insertion loss,uniformity,and flat-top spectral response was investigated.The results show that by increasing the output waveguide width and increasing the circular ra-dius ratio of the star coupler,the device achieves sparse wavelength division multiplexing/demultiplexing with a channel spacing of 20 nm when operating near the 1 310 nm wavelength.The insertion loss is-1.28 dB with a non-uniformity of 0.18 dB,and the average crosstalk is-25.18 dB.Meanwhile,this device has a 1 dB band-width of 11.93 nm and achieves a flat-top spectral response with low loss and high uniformity.Compared to tradi-tional Gaussian-shaped devices,this device effectively enhances the device bandwidth and system stability,making it more suitable for the commercial applications of silicon nitride AWG devices.关键词
波分复用技术/阵列波导光栅(AWG)/氮化硅/光子集成技术/平顶光谱响应/非均匀度Key words
wavelength division multiplexing technology/array waveguide grating(AWG)/silicon nitride/photonic in-tegration technology/flat-top spectral response/non-uniformity分类
电子信息工程引用本文复制引用
张赞允,姜浩,李美欣,孟翠然,杜小伟,张文静..具有平顶光谱响应的氮化硅阵列波导光栅[J].天津工业大学学报,2025,44(5):59-65,7.基金项目
国家自然科学基金项目(61675191,61974099) （61675191,61974099）
天津市光电检测技术与系统重点实验室开放课题(2023LOTDS004) （2023LOTDS004）
