天津工业大学学报2025，Vol.44Issue(5)：66-71,6.DOI:10.3969/j.issn.1671-024x.2025.05.010
基于聚合物薄膜的CMUT阵列的声场特性仿真分析
Simulation analysis of acoustic field characteristics of CMUT array based on polymer film
摘要
Abstract
To meet the requirements of ultrasonic testing technology for the focusing characteristics of ultrasonic transduc-ers,a CMUT array based on polymer film SU-8 was designed.Based on the acoustic field theory of the array transducer,the parameters affecting the focusing effect were determined.COMSOL Multiphysics simulation soft-ware was used for modeling and simulation analysis to explore the acoustic field focusability of one-dimensional CMUT linear array in air and water media with different number and spacing of elements.The results show that the acoustic field focusing effect of the array transducer is the best when the CMUT array has 16 elements and the array element spacing is 0.5.The maximum sound pressure in the focusing area of the sound field reaches 7.23×10-5 Pa in air medium and 0.17 Pa in water medium.关键词
聚合物薄膜/CMUT阵列/有限元仿真/声场聚焦Key words
polymer film/CMUT array/finite element simulation/acoustic field focusing引用本文复制引用
高铁成,闫梦圆,孙晓东..基于聚合物薄膜的CMUT阵列的声场特性仿真分析[J].天津工业大学学报,2025,44(5):66-71,6.基金项目
国家自然科学基金青年项目(61605144) （61605144）
