太赫兹科学与电子信息学报2025，Vol.23Issue(10)：1089-1106,18.DOI:10.11805/TKYDA2024119
MEMS电容式加速度计抗冲击研究进展
Research progress on shock resistance of MEMS capacitive accelerometers
吴健 1谢国芬 1熊壮1
作者信息
- 1. 中国工程物理研究院 电子工程研究所,四川 绵阳 621999
- 折叠
摘要
Abstract
Micro-Electromechanical Systems(MEMS)inertial accelerometers are important devices in microelectronic inertial navigation systems.They have broad application prospects in the current upgrading process of unguided munitions guidance.Research on the anti-high overload technology of devices such as projectile-borne accelerometers has become one of the main technical bottlenecks restricting their rapid development.MEMS capacitive accelerometers belong to structural sensors and perform well in measuring high overload dynamics during ammunition launch.This paper introduces the development process of relevant models and experimental exploration of MEMS sensor failure mechanisms from the study of cannon launch environments.It also provides an overview of the current status of anti-overload research on the MEMS capacitive accelerometers,leading research organizations and commercial devices worldwide,and it also proposes a novel high-g packaging scheme based on the squeeze-film air damping.Finally,it summarizes the current methods and designs applicable to anti-high overload design of MEMS capacitive accelerometers,aiming to provide a comprehensive understanding on the research status of anti-high overload characteristics of MEMS capacitive accelerometers.关键词
微机电系统/电容式加速度计/抗冲击/结构设计Key words
Micro-Electromechanical Systems(MEMS)/capacitive-accelerometer/impact resistance/structure design分类
电子信息工程引用本文复制引用
吴健,谢国芬,熊壮..MEMS电容式加速度计抗冲击研究进展[J].太赫兹科学与电子信息学报,2025,23(10):1089-1106,18.
