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Nonlinear effect analysis and compensation based on improved friction observer for torque rotating stage

Yingjie Jia Bo Liu Hui Tang Yuzhang Wei

Nanotechnology and Precision Engineering2025，Vol.8Issue(3)：P.138-148,11.

Nanotechnology and Precision Engineering2025，Vol.8Issue(3)：P.138-148,11.DOI:10.1063/10.0036170

Nonlinear effect analysis and compensation based on improved friction observer for torque rotating stage

Yingjie Jia ¹Bo Liu ¹Hui Tang ²Yuzhang Wei¹

作者信息

1. State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China
2. School of Engineering,University of Warwick,Coventry CV47AL,United Kingdom
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摘要

关键词

Rotating stage/Mechanical analysis/Frictional nonlinear effect/Disturbance observation

分类

机械制造

引用本文复制引用

Yingjie Jia,Bo Liu,Hui Tang,Yuzhang Wei..Nonlinear effect analysis and compensation based on improved friction observer for torque rotating stage[J].Nanotechnology and Precision Engineering,2025,8(3):P.138-148,11.

基金项目

funded by the European Union’s Horizon 2020 Research and Innovation Program under the Marie Sklodowska-Curie Grant Agreement(Grant No.101026104) （Grant No.101026104）

by the National Natural Science Foundation of China(Grant No.U20A6004) （Grant No.U20A6004）

in part by the State Key Laboratory of Precision Electronics Manufacturing Technology and Equipment(Grant No.JMDZ202314). （Grant No.JMDZ202314）

Nanotechnology and Precision Engineering

ISSN：1672-6030

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