Nanotechnology and Precision Engineering2025，Vol.8Issue(3)：P.117-130,14.DOI:10.1063/10.0036171
One-step quartz-MEMS micro-fabrication strategy for a grooved tuning fork
Yide Dong 1Chunyan Yin 1Guangbin Dou 1Litao Sun1
作者信息
- 1. SEU-FEI Nano-Pico Center,Key Laboratory of MEMS of Ministry of Education,School of Integrated Circuits,Southeast University,Nanjing 210096,China
- 折叠
摘要
关键词
Quartz crystal/Quartz MEMS/Microfabrication/Grooved tuning fork分类
机械制造引用本文复制引用
Yide Dong,Chunyan Yin,Guangbin Dou,Litao Sun..One-step quartz-MEMS micro-fabrication strategy for a grooved tuning fork[J].Nanotechnology and Precision Engineering,2025,8(3):P.117-130,14.
