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Investigation of the machinability of(001)single-crystal β-Ga_(2)O_(3) via tribological methodology

Shuo Li Peng Gao Guosong Zeng

Nanotechnology and Precision Engineering2025，Vol.8Issue(3)：P.109-116,8.

Nanotechnology and Precision Engineering2025，Vol.8Issue(3)：P.109-116,8.DOI:10.1063/5.0253608

Investigation of the machinability of(001)single-crystal β-Ga_(2)O_(3) via tribological methodology

Shuo Li ¹Peng Gao ²Guosong Zeng³

作者信息

1. The Key Laboratory for Intelligence Robotics and Flexible Manufacturing Systems(RobFMS),Southern University of Science and Technology,Shenzhen 518055,China Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen 518055,China
2. College of Semiconductors(National Graduate College for Engineers),Southern University of Science and Technology,Shenzhen 518055,China
3. The Key Laboratory for Intelligence Robotics and Flexible Manufacturing Systems(RobFMS),Southern University of Science and Technology,Shenzhen 518055,China Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen 518055,China College of Semiconductors(National Graduate College for Engineers),Southern University of Science and Technology,Shenzhen 518055,China SUSTech Energy Research Institute for Carbon Neutrality,Southern University of Science and Technology,Shenzhen 518055,China
折叠

摘要

关键词

β-Ga_(2)O_(3)/Wear mechanism/Humidity/Anisotropy

分类

化学化工

引用本文复制引用

Shuo Li,Peng Gao,Guosong Zeng..Investigation of the machinability of(001)single-crystal β-Ga_(2)O_(3) via tribological methodology[J].Nanotechnology and Precision Engineering,2025,8(3):P.109-116,8.

基金项目

financial support from the Shenzhen Key Laboratory of Intelligent Robotics Flexible and Manufacturing Systems(Grant No.ZDSYS20220527171403009) （Grant No.ZDSYS20220527171403009）

the Shenzhen Science and Technology Innovation Commission(Grant No.20231115111658002). （Grant No.20231115111658002）

Nanotechnology and Precision Engineering

ISSN：1672-6030

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