极端制造（英文）2025，Vol.7Issue(6)：379-391,13.DOI:10.1088/2631-7990/adec26
Adaptive beam-shaping enabled high-precision patterned laser micro-grooving
Adaptive beam-shaping enabled high-precision patterned laser micro-grooving
摘要
关键词
laser ablation/patterned laser/adaptive beam-shaping/ablation profile evolution/microgroovesKey words
laser ablation/patterned laser/adaptive beam-shaping/ablation profile evolution/microgrooves引用本文复制引用
Pei Qiu,Jun Li,Dandan Yuan,Zixuan Xin,Jiaxu Huang,Shaolin Xu..Adaptive beam-shaping enabled high-precision patterned laser micro-grooving[J].极端制造（英文）,2025,7(6):379-391,13.基金项目
This work was financially supported by the National Natural Science Foundation of China(Grant No.52375438),the Guangdong Talent Project(Grant No.2023TQ07Z453),the Shenzhen Science and Technology Programs(Grant Nos.JCYJ20220818100408019 and JSGG20220831101401003),and Jiangyin-SUSTech Innovation Fund.We wish to thank Materials Characterization and Preparation Center of Southern University of Science and Technology for the SEM characterization. （Grant No.52375438）
