计量学报2025，Vol.46Issue(10)：1411-1418,8.DOI:10.3969/j.issn.1000-1158.2025.10.02
柔性微型阵列式聚偏二氟乙烯压电传感器
PVDF Based Flexible Piezoelectric Sensor with Micro Electrodes Array
摘要
Abstract
Aiming to realize the function of integrating on surfaces of large curvature and measuring multi-point dynamic pressure,a PVDF(Polyvinylidene Fluoride)based flexible piezoelectric sensor with micro electrodes array was developed.Firstly,the structure of the sensor was designed according to the characteristics of the PVDF piezoelectric film and the application condition of the sensor,meanwhile the working principle of the sensor was built up.Then,the simulation model of the piezoelectric sensor with four arrayed elements was established,while the theoretical pressure measurement result of the piezoelectric sensor was calculated.The good dynamic response capability and independent pressure measurement performance of the arrayed elements on sensor were verified by the mechanical-electrical coupling simulation.Finally,a PVDF based flexible piezoelectric sensor with four sensing units was prepared by microfabrication technology.A customized platform for pressure measurement with liquid environment was built to realize the calibration of sensor sensitivity under dynamic liquid pressure.The sensitivity of one sensor unit was calibrated as 19.67 mV/kPa.The piezoelectric signal trend of the sensor units were consistent with the measured pressure,confirmed by the tests of arrayed pressure measurement,verifying the capability of acquiring arrayed dynamic signal.关键词
力学计量/压电传感器/柔性电子/PVDF压电薄膜/动态压力/阵列测压Key words
mechanical metrology/piezoelectric sensor/flexible electronics/PVDF piezoelectric film/dynamic pressure/arrayed pressure measurement引用本文复制引用
祁一洲,张春雷,周涛,肖建亮,唐瑞涛,傅棋琪,吴彬彬,陈颖,叶柳顺,熊永昌,张生林,滕乙超,赵圣浩,张正昕..柔性微型阵列式聚偏二氟乙烯压电传感器[J].计量学报,2025,46(10):1411-1418,8.基金项目
国家自然科学基金(12002313,U20A6001,22405237,12202398) （12002313,U20A6001,22405237,12202398）
浙江省教育厅科研资助项目(Y202353719) （Y202353719）
温州市重大科技创新攻关项目(ZZG2023006) （ZZG2023006）
