计量学报2025，Vol.46Issue(10)：1446-1453,8.DOI:10.3969/j.issn.1000-1158.2025.10.06
空间三角形大长度激光测量装置系统参数自标定方法研究
Self-calibration Method and Application Study of System Parameters in Large-scale Laser Measurement Systems
摘要
Abstract
In the long-distance laser measurement system for spatial triangles,the side length of the triangle composed of three laser interferometers is the key factor affecting the measurement accuracy,and its accurate measurement can help the system eliminate Abbe errors.However,in practical operation,due to the need to detect different instruments,the position of the laser interferometer may change,resulting in inaccurate side length measurement and residual Abbe error.To evaluate the impact of the side length of a spatial triangle on the residual Abbe error,the side length is defined as a system parameter.On the basis of analyzing the principle of Abbe error elimination,considering the influence of system parameters on error elimination,a system parameter self calibration method based on nonlinear least squares method is proposed.Simulation optimization shows that this method can significantly improve measurement accuracy.Experimental verification shows that when the fourth interferometer is on the inner side of the triangle,the maximum errors of the three experiments decrease from 2.49,2.60,and 2.57 μm to 0.59,0.75,and 0.63 μm;When on the outer side,it decreases from 4.01,3.46,and 3.61 μm to 1.61,1.38,and 1.78 μm.The effectiveness of the system parameter self calibration method has been verified,which can obtain system parameters in real time,improve the accuracy and detection efficiency of the measurement device,and effectively solve the problem of residual Abbe error.关键词
几何量计量/大长度测量/阿贝误差/参数自标定Key words
geometric metrology/large length measurement/Abbe error/parameter self-calibration引用本文复制引用
伏鹏,胡煜,缪东晶,蒋远林,王珉,铁铮,唐小聪,李连福,李建双..空间三角形大长度激光测量装置系统参数自标定方法研究[J].计量学报,2025,46(10):1446-1453,8.基金项目
国家重点研发计划(2021YFF0600205) （2021YFF0600205）
国家市场监督管理总局科技计划项目(2022MK155) （2022MK155）
质量技术基础能力建设专项(ANL2404) （ANL2404）
