航空科学技术2025，Vol.36Issue(10)：30-38,9.DOI:10.19452/j.issn1007-5453.2025.10.004
用于流场压力分布测量的柔性电容阵列传感器研究
Research on Flexible Capacitive Sensor Array for Flow Field Pressure Distribution Measurement
摘要
Abstract
The measurement of flow field pressure distribution on the surfaces of aerospace equipment is critical for structural optimization,performance evaluation,and safety assurance.Addressing the limitations of traditional rigid sensors,which weaken structural integrity due to perforated installation and are unsuitable for surface-wide pressure distribution measurements,this paper developed a micro-pillar-supported flexible capacitive sensor array for flow field pressure measurement.The sensor leverages a suspended sensing membrane with support isolation,where the membrane's bending deformation under pressure adjusts the electrode spacing,enabling precise measurement of both positive and negative pressures.Furthermore,the sensor's measurement range can be expanded by tuning the dimensions of the micro-pillar structure beneath the suspended membrane to accommodate high-pressure flow fields.The sensor array is fabricated from high-stability polyimide using a high-precision imprinting process,ensuring efficient microstructural formation and consistent sensing performance.Additionally,bonding technology is employed to construct the support isolation structure,effectively separating adjacent pixels and significantly reducing signal crosstalk.The developed sensor array maintains a linear sensitivity of approximately 1.8％in the range of 0～1.5 MPa,with a repeatability of 1.6％and a consistency of 4.9％.It can be conformally mounted on a scaled wing model to measure the flow field pressure distribution,including the positive and negative pressure differences on the upper and lower wing surfaces.This sensor demonstrates significant potential for applications in flow field pressure monitoring in the aerospace field.关键词
流场压力/柔性电容传感器/机翼/原位测量/宽测量范围Key words
flow field pressure/flexible capacitive sensor/wing/in-situ measurement/wide measurement range分类
计算机与自动化引用本文复制引用
邓世政,刘林杰,张琦,谷士鹏,陈小亮..用于流场压力分布测量的柔性电容阵列传感器研究[J].航空科学技术,2025,36(10):30-38,9.基金项目
航空科学基金(20220046070001) （20220046070001）
陕西省重点研发计划(2022GXLH-01-12) Aeronautical Science Foundation of China(20220046070001) （2022GXLH-01-12）
Key Research and Development Program of Shaanxi(2022GXLH-01-12) （2022GXLH-01-12）
