集成技术2025，Vol.14Issue(6)：88-104,17.DOI:10.12146/j.issn.2095-3135.20250716001
柔性热电技术在微电子电路中的集成与应用
Integration and Application of Flexible Thermoelectric Technology on Microelectronic Circuits
摘要
Abstract
With the improvement of circuit integration,conventional silicon-based devices face the problem of uncontrollable temperature rise in high-frequency and high-power scenarios.Moreover,their rigidity and brittleness are contrary to the contemporary demand for lightness and flexibility.Therefore,it is necessary to develop effective thermal management strategies for silicon-based systems and to explore alternative non-silicon materials.Flexible thermoelectric conversion technology addresses these challenges by enabling simultaneous active cooling of silicon devices and sustainable power generation for flexible electronics,establishing it as a research hotspots in microelectronics.This paper systematically examines the fundamental principles of thermoelectric cooling and energy harvesting firstly.Secondly,it reviews design strategies for chip-level thermal management and flexible thermoelectric self-powered systems,with a focus on innovations in thermoelectric materials,microscale engineering,thin-film architectures,and novel structural designs.Furthermore,the paper discusses comprehensive self-powered system architectures,including energy harvesting techniques,power management circuits,and storage solutions.Finally,it explores synergistic integration with multi-energy systems and cross-disciplinary advancements enabled by artificial intelligence,providing theoretical frameworks and practical guidance to facilitate the large-scale deployment of next-generation microelectronics.关键词
热电技术/集成技术/微电子/制冷/发电Key words
thermoelectrics technology/integrated technology/microelectronics/cooling/power generation分类
信息技术与安全科学引用本文复制引用
陈坤豪,刘文静,张万田,逯瑶..柔性热电技术在微电子电路中的集成与应用[J].集成技术,2025,14(6):88-104,17.基金项目
国家重点研发计划项目(2024YFA1210400) （2024YFA1210400）
国家自然科学基金青年基金项目(52402232) （52402232）
广东省基础与应用基础研究基金联合基金-青年基金项目(2023A1515110512) （2023A1515110512）
松山湖材料实验室开放课题基金项目(2023SLABFN15) （2023SLABFN15）
南方科技大学科研启动基金项目(Y01796223) This work is supported by National Key Research and Development Program of China(2024YFA1210400) （Y01796223）
Youth Fund of the National Natural Science Foundation of China(52402232) （52402232）
Guangdong Basic and Applied Basic Research Foundation(2023A1515110512) （2023A1515110512）
Open Research Fund of Songshan Lake Materials Laboratory(2023SLABFN15) （2023SLABFN15）
Research Start-Up Fund Project of Southern University of Science and Technology(Y01796223) （Y01796223）
