集成技术2025，Vol.14Issue(6)：105-116,12.DOI:10.12146/j.issn.2095-3135.20250630003
热蒸发法制备Ag2Se柔性薄膜及器件
Thermal Evaporation Method for Preparing Ag2Se Flexible Thin Films and Devices
摘要
Abstract
The burgeoning development of wearable devices has spurred an urgent demand for green and efficient power supply solutions,propelling miniaturized flexible thermoelectric generators to the forefront of research.Nevertheless,the performance constraints of thermoelectric materials and intricate device design challenges remain formidable barriers to technological advancement in this field.Silver selenide(Ag2Se),a highly promising thermoelectric material,exhibits room-temperature performance comparable to that of the conventional bismuth telluride(Bi2Te3),thereby offering novel opportunities for the development of flexible thermoelectric devices.In this work,Ag2Se thin films were synthesized on polyimide(PI)substrates via thermal evaporation.By systematically varying the annealing temperature,we achieved precise control over the preferred(013)orientation of the Ag2Se films.The film annealed at 453 K,with a thickness of 580 nm,demonstrated a maximum power factor of 14.87 μW/(cm·K2).Subsequent post-selenization treatment was applied to further optimized the composition of the Ag2Se thin films,elevating the power factor to 19.13 μW/(cm·K2).Based on the optimized thin films,an Ag2Se-Ag single-leg flexible thermoelectric generator was fabricated.Under a temperature gradient of 40 K,the device delivered a maximum output power of 235.2 nW.Notably,the flexibility of the device was significantly improved by introducing a spin-coated poly(vinyl laurate)organic layer.It retained over 90%of its initial performance after 1000 repeated bending cycles at a small radius of 6 mm.These findings collectively underscore the substantial potential of Ag2Se devices prepared via thermal evaporation for applications in wearable power generation.关键词
Ag2Se薄膜/热蒸发/取向调控/成分调节/柔性发电器件Key words
Ag2Se thin film/thermal evaporation/orientation control/composition regulation/flexible power generation device分类
通用工业技术引用本文复制引用
吴宇基,钟一鸣,陈宁,胥瀚文,钟梓楠,刘朋娟,陈跃星,李颖贞,郑壮豪..热蒸发法制备Ag2Se柔性薄膜及器件[J].集成技术,2025,14(6):105-116,12.基金项目
国家自然科学基金项目(62074102) This work is supported by National Natural Science Foundation of China(62074102) （62074102）
