吉林大学学报（理学版）2025，Vol.63Issue(6)：1767-1774,8.DOI:10.13413/j.cnki.jdxblxb.2024082
飞秒激光制备高红外吸收SiC表面
High Infrared Absorption SiC Surface Prepared by Femtosecond Laser
摘要
Abstract
We used femtosecond laser processing technology to improve the optical absorption rate of SiC in the infrared band(especially within the 10.3-12.6 pm range),in order to solve the problem of traditional processing techniques being difficult to finely process and having low absorption rates.We used femtosecond laser direct writing technology to generate specific micro/nanostructures on the surface of SiC by adjusting key parameters of laser processing,and analyzed the surface morphology and optical properties of the processed samples by using scanning electron microscopy and Raman spectrum.The results show that the surface morphology of SiC can be effectively modulated through femtosecond laser processing,and its infrared absorption rate is significantly improved,with a maximum absorption rate of 92％.The nanostructures can reduce the reflectance of materials and enhance the excitation of surface phonon polaritons,thereby enhancing the infrared light absorption capacity of materials.关键词
超快激光/减反射/剩余射线带/Raman光谱Key words
ultrafast laser/antireflection/Reststrahlen band/Raman spectrum分类
信息技术与安全科学引用本文复制引用
郭明瑞,赵智炎,李健,王燕,李爱武,徐颖,于颜豪..飞秒激光制备高红外吸收SiC表面[J].吉林大学学报（理学版）,2025,63(6):1767-1774,8.基金项目
吉林省科技厅科技发展计划项目(批准号:20220101088JC)和吉林省教育厅科技计划项目(批准号:JJKH20200664KJ). （批准号:20220101088JC）
