光学精密工程2025，Vol.33Issue(20)：3228-3238,11.DOI:10.37188/OPE.20253320.3228
阶梯式聚磁永磁定位磁针设计与试验
Design and experiment of stepped polymagnetic permanent magnet positioning magnetic needle
摘要
Abstract
To improve the magnetic density peak-to-valley effect of the permanent magnet positioning ar-ray magnetic needle in the fluid magnetic mass transfer of Mini/Micro LED chips,a stepped polymagnetic permanent magnet positioning magnetic needle was proposed.For this stepped polymagnetic permanent magnet needle structure,a multistage equivalent magnetic circuit model incorporating nonlinear demagneti-zation effects and magnetic circuit saturation characteristics,as well as a mechanical dynamic model consid-ering chip motion characteristics and fluid-structure interaction,were established.Based on this,with the core objectives of improving the magnetic field peak-to-valley change rate and peak-to-valley change speed,the height and diameter parameters of each stage of the magnetic needle were subjected to step-by-step parametric simulation using finite element analysis software.This determined the optimal three-di-mensional structural parameters for a high-performance magnetic needle under specific geometric scale and process constraints.A prototype magnetic needle was developed based on the optimization results,and the effectiveness of the optimization was verified through magnetic needle magnetic density measurement tests and mass transfer tests.The results show that the optimized magnetic needle achieved a magnetic density peak-to-valley change rate δ of 82.3%and a peak-to-valley change speed ζ of 44.8 mT/mm,rep-resenting improvements of 20.1%and 28.7%,respectively.A fluid magnetic mass transfer experiment involving 4 500 chips was conducted on a 180 mm×160 mm receiving substrate,with a transfer time of only 3 minutes,reducing the time by 40%compared to existing solutions.关键词
巨量转移/阶梯式结构/动态模型/磁场优化Key words
mass transfer/stepped structure/dynamic model/magnetic field optimization分类
信息技术与安全科学引用本文复制引用
刘强,宋仕辉,牛萍娟,陈云喆,俞建荣..阶梯式聚磁永磁定位磁针设计与试验[J].光学精密工程,2025,33(20):3228-3238,11.基金项目
北京市属高等学校高水平科研创新团队建设支持计划资助项目(No.BPHR20220110) （No.BPHR20220110）
