光学精密工程2025，Vol.33Issue(20)：3252-3264,13.DOI:10.37188/OPE.20253320.3252
宏-微-纳跨尺度粘滑型压电驱动器动力学建模与试验评价
Dynamic modeling and experimental evaluation of Macro-Micro-Nano cross-scale stick-slip piezoelectric actuators
摘要
Abstract
To meet the precision driving requirements of wafer inspection systems and the internal optical systems of scanning electron microscopes(SEMs)in the field of micro-nano electronics manufacturing,a stick-slip piezoelectric actuator with Macro-Micro-Nano cross-scale drive was proposed in this study.First,the structural design of the slider and stator of the actuator and its driving principle were elaborated in detail,and the dimensional parameters of the stator structure were optimized by finite element simula-tion method.Then,the dynamic model of the actuator was constructed to analyze its stepping characteris-tics.The simulation results showed that the actuator was capable of micro-stepping displacement.Final-ly,the prototype of the actuator was fabricated,and the experimental system was built to evaluate its out-put performance.The experimental results indicate that the proposed actuator exhibits a maximum no-load speed of 20.3 mm/s,a maximum step displacement of 15.82 μm,a positioning resolution of 70 nm,and a maximum load of 2.2 N,which can meet the cross-scale driving requirements of macro large-stroke con-tinuous movement,micro-scale step displacement,and nano-scale high-precision positioning.This study provides an essential theoretical and experimental basis for the application of stick-slip piezoelectric actua-tors in critical scenarios such as the alignment of aperture plates in SEM optical systems and wafer inspec-tion platforms.关键词
粘滑型压电驱动器/跨尺度/精密定位/动力学建模Key words
stick-slip piezoelectric actuator/cross-scale/precision positioning/dynamic modeling分类
机械制造引用本文复制引用
云浩,陈延龙,原路生,李京顺,张登攀..宏-微-纳跨尺度粘滑型压电驱动器动力学建模与试验评价[J].光学精密工程,2025,33(20):3252-3264,13.基金项目
河南省科技攻关项目(No.252102221010) （No.252102221010）
河南省高等学校重点科研项目(No.25A460010) （No.25A460010）
河南省高校基本科研业务费专项资金资助 （）
