四川大学学报（自然科学版）2025，Vol.62Issue(6)：1425-1431,7.DOI:10.19907/j.0490-6756.250052
脉冲磁控溅射氧化铝涂层的制备、优化及离子辐照效应
Preparation,optimization and ion irradiation effect of Al2O3 coatings by pulsed magnetron sputtering
摘要
Abstract
Al2O3 coatings are considered promising functional coating materials for nuclear reactor applica-tions owing to their excellent physical and chemical properties.However,the full realization of their perfor-mance advantages highly depends on the preparation process and microstructural regulation of the coatings.Magnetron sputtering technology,with its high deposition efficiency and strong film-substrate adhesion,is widely used in the preparation of Al2O3 coatings.Current research mainly focuses on ion irradiation-induced amorphous-crystalline phase transitions,irradiation void evolution,and the resulting mechanical property deg-radation and functional failure mechanisms.In contrast,studies on the stability of the Al2O3-stainless steel in-terface under irradiation remain relatively scarce.In this study,Al2O3 coatings were deposited on 316L stain-less steel and single-crystal silicon substrates via Pulsed Magnetron Sputtering(PMS).The regulatory mechanisms of sputtering current,Ar/O2 flow ratio,and deposition time on coating composition were sys-tematically investigated.Additionally,the irradiation response mechanism was analyzed through Au-ion irra-diation experiments.Results indicate that the matching of the sputtering current and the Ar/O2 flow ratios was critical for optimizing the chemical composition of Al2O3 coatings.Specifically,an amorphous Al2O3 coating with the theoretical stoichiometric ratio can be obtained under the parameters of 0.25 A sputtering current and 3:1 Ar/O2 flow ratio.After Au-ion irradiation,the surface roughness of the coatings decreases,voids form in-ternally,and a unique longitudinal stratification phenomenon emerges:The upper layer is dominated by low-crystallinity/amorphous phase,while the lower layer consists of high-density nanocrystalline clusters.An atomic mixed transition layer forms at the steel-coating interface.This work provides an insight into the con-trollable fabrication and irradiation-resistant property of Al2O3 coatings for nuclear reactor applications.关键词
氧化铝涂层/脉冲磁控溅射/离子辐照/化学组分/界面稳定性Key words
Al2O3 coatings/Pulsed magnetron sputtering/Ion irradiation/Chemical composition/Interfacial stability分类
矿业与冶金引用本文复制引用
黄炜强,杨文华,张亮,任绍弘,邹宇,杨吉军,展长勇..脉冲磁控溅射氧化铝涂层的制备、优化及离子辐照效应[J].四川大学学报（自然科学版）,2025,62(6):1425-1431,7.基金项目
国家自然科学基金(U2241235,12305317) （U2241235,12305317）
四川省自然科学基金(2024NSFSC0424) （2024NSFSC0424）
四川省科技计划(24NSFSC0948) （24NSFSC0948）
