首页|期刊导航|无机材料学学报（英文）|Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices

Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices

Xingxu Zhang Hao Wu Yuhui Zhang Jian Luo Tao Ye Kai Tao Jinjun Deng Binghe Ma Weizheng Yuan

无机材料学学报（英文）2025，Vol.11Issue(1)：86-96,11.

无机材料学学报（英文）2025，Vol.11Issue(1)：86-96,11.DOI:10.1016/j.jmat.2024.02.009

Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices

Xingxu Zhang ¹Hao Wu ¹Yuhui Zhang ¹Jian Luo ¹Tao Ye ¹Kai Tao ¹Jinjun Deng ¹Binghe Ma ¹Weizheng Yuan¹

作者信息

1. Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace,Northwestern Polytechnical University,Xi'an,710072,China
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摘要

关键词

V-doped ZnO/Lead-free/Piezoelectric micromachined ultrasonic transducers/Beam-island structure/Enhanced performance

Key words

V-doped ZnO/Lead-free/Piezoelectric micromachined ultrasonic transducers/Beam-island structure/Enhanced performance

引用本文复制引用

Xingxu Zhang,Hao Wu,Yuhui Zhang,Jian Luo,Tao Ye,Kai Tao,Jinjun Deng,Binghe Ma,Weizheng Yuan..Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices[J].无机材料学学报（英文）,2025,11(1):86-96,11.

基金项目

This work is supported by the National Natural Science Foun-dation of China(Grant No.52205602 & 52075455). （Grant No.52205602 & 52075455）

无机材料学学报（英文）

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