首页|期刊导航|无机材料学学报（英文）|Direct observation of phase transition in Hf0.5Zr0.5O2 thin films affected by top electrodes using in-situ STEM heating

Direct observation of phase transition in Hf0.5Zr0.5O2 thin films affected by top electrodes using in-situ STEM heating

Qijun Yang Yichun Zhou Min Liao Siwei Dai Changfan Ju Keyu Bao Binjian Zeng Shuaizhi Zheng Jiajia Liao Jiangang Guo Sirui Zhang

无机材料学学报（英文）2025，Vol.11Issue(5)：69-76,8.

无机材料学学报（英文）2025，Vol.11Issue(5)：69-76,8.DOI:10.1016/j.jmat.2025.101075

Direct observation of phase transition in Hf0.5Zr0.5O2 thin films affected by top electrodes using in-situ STEM heating

Qijun Yang ¹Yichun Zhou ¹Min Liao ²Siwei Dai ¹Changfan Ju ³Keyu Bao ¹Binjian Zeng ³Shuaizhi Zheng ³Jiajia Liao ²Jiangang Guo ⁴Sirui Zhang¹

作者信息

1. School of Advanced Materials and Nanotechnology,Xidian University,Xi'an,710071,China
2. School of Advanced Materials and Nanotechnology,Xidian University,Xi'an,710071,China||Guangzhou Institute of Technology,Xidian University,Guangzhou,510555,China
3. Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education,School of Materials Science and Engineering,Xiangtan University,Xiangtan,411105,China
4. Beijing National Laboratory for Condensed Matter Physics,Institute of Physics,Chinese Academy of Sciences,Beijing,100190,China
折叠

摘要

关键词

Hf0.5Zr0.5O2 ferroelectric thin films/In-situ STEM/Phase transition/Top electrode

Key words

Hf0.5Zr0.5O2 ferroelectric thin films/In-situ STEM/Phase transition/Top electrode

引用本文复制引用

Qijun Yang,Yichun Zhou,Min Liao,Siwei Dai,Changfan Ju,Keyu Bao,Binjian Zeng,Shuaizhi Zheng,Jiajia Liao,Jiangang Guo,Sirui Zhang..Direct observation of phase transition in Hf0.5Zr0.5O2 thin films affected by top electrodes using in-situ STEM heating[J].无机材料学学报（英文）,2025,11(5):69-76,8.

基金项目

This work was partially supported by the Scientific Research Innovation Capability Support Project for Young Faculty(Grant No.ZYGXQNJSKYCXNLZCXM-M22),the National Natural Science Foundation of China(Grant Nos.52122205,51901166,12302429,12474092 and 52250308),the National Key Research and Devel-opment Program of China(Grant No.2024YFA1208603),the Nat-ural Science Basic Research Program of Shaanxi(Program No.2024JC-YBQN-0583),the Guangdong Basic and Applied Basic Research Foundation(No.2022A1515110116),the Fundamental Research Funds for the Central Universities,and the Innovation Fund of Xidian University. （Grant No.ZYGXQNJSKYCXNLZCXM-M22）

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