传感技术学报2025，Vol.38Issue(11)：1940-1946,7.DOI:10.3969/j.issn.1004-1699.2025.11.003
双模态陶瓷-石墨烯压力传感器的设计与仿真
Design and Simulation of Two-Mode Ceramic-Graphene Pressure Sensor
摘要
Abstract
Targeting at the limitation of single-mode pressure sensor in measurement,a dual-mode ceramic-graphene pressure sensor is proposed.It is a kind of suspended LC resonant pressure sensor composed of graphene film attached to alumina substrate,which can simultaneously realize two measurement modes of capacitance and resistance.Through the simulation of COMSOL software,the influence of the main size of the sensor on its mechanical characteristics is explored,and the reasonable structure of the sensor is designed.The linear analysis of the simulation results shows that the linear error of the capacitance mode is 3.52%,the sensitivity is 0.933 GHz/MPa,the linear error of the resistance mode is 3.61%,and the sensitivity is 1.87 MΩ/MPa in the pressure range of 0～1 MPa,and the linear degree of the resistance mode is better in the pressure range of 0～0.2 MPa.关键词
传感器技术/多模态压力测量/COMSOL/石墨烯薄膜/氧化铝陶瓷Key words
sensor technology/multimodal pressure measurement/COMSOL/graphene film/alumina ceramics分类
信息技术与安全科学引用本文复制引用
高雅洁,李晨,苗静..双模态陶瓷-石墨烯压力传感器的设计与仿真[J].传感技术学报,2025,38(11):1940-1946,7.基金项目
国家自然科学基金项目(52275552) （52275552）
