高等学校化学学报2025，Vol.46Issue(12)：88-96,9.DOI:10.7503/cjcu20250220
磁控溅射制备MoON薄膜电极及其电化学储能性质
Magnetron-Sputtered MoON Thin Film Electrode for High-performance Electrochemical Energy Storage
摘要
Abstract
MoON thin films with gradient oxygen content were prepared by magnetron sputtering.The effects of N2/O2 partial pressures during the preparation process on the microstructure,crystallinity,chemical bonding,electrical conductivity and electrochemical energy storage performance of MoON thin film electrodes were studied.The results reveal that when the flow rate(sccm)ratio of Ar/N2/O2 is 240∶50∶10,the MoON thin-film electrode exhibits the optimal energy storage performance.In a 1 mol/L Na2SO4 solution,its capacitance per unit area increases from 134 mF/cm²(pure MoN thin-film electrode)to 211 mF/cm²,with an increase of 57.5%.Moreover,it has excellent cycle stability with no capacitance retention decay after 10000 charge and discharge cycles.关键词
MoON薄膜/磁控溅射/薄膜电极/电化学储能性质Key words
MoON film/Magnetron sputtering/Thin film electrode/Electrochemical energy storage property分类
化学化工引用本文复制引用
万志鑫,余威,张敏轩,徐格,冒爱琴..磁控溅射制备MoON薄膜电极及其电化学储能性质[J].高等学校化学学报,2025,46(12):88-96,9.基金项目
安徽省高校科研项目(批准号:RZ2400002951)资助. Supported by the Natural Science Research Project of Anhui Provincial Educational Committee,China(No.RZ2400002951). （批准号:RZ2400002951）
