硅酸盐学报2025，Vol.53Issue(12)：3435-3445,11.DOI:10.14062/j.issn.0454-5648.20250546
原位诊断4英寸铌酸锂晶体生长工艺过程的界面热输运
In-situ Diagnosis of Interfacial Heat Transport During Growth Process of 4-inch Lithium Niobate Crystals
摘要
Abstract
Introduction Although the Czochralski method for large-size crystal growth has been developed for over a century,the in-situ acquisition of interface states becomes a challenge due to the extreme environment of high temperature,high pressure,strong electromagnetic interference,and the coexistence of solid,liquid,and gas phases.To address the challenge of real-time monitoring of interface instability during the growth of large lithium niobate crystals,we combined the temporal evolution of key process parameters such as pulling rate,rotation rate,and power-of a 4-inch optical-grade lithium niobate crystal with the synchronous time of its growth interface's intrinsic growth interface electromotive force(GEMF).This integration enabled a full-process in-situ analysis of how growth conditions affect the growth interface.The GEMF analysis revealed pronounced interface instability phenomena,which sensitively,quantitatively,and in real time reflect temperature fluctuations at the interface and the inversion phenomena during shoulder growth,thus filling the detection blind spots left by conventional load-cell sensors and thermocouples.In this work,a correlation model between GEMF and interfacial heat and mass transfer was established,and an in-situ method was proposed to evaluate the stability of the crystal growth interface,providing a crucial theoretical foundation and an innovative technical approach for the preparation of high-quality,large-size crystals. Methods For the synthesis of CLN polycrystalline powder,high purity(99.99%)materials of Li2CO3 and Nb2O5 in a molar ratio of 0.946 were mixed,ground and calcined.Afterwards,the ground mixture was molten in a platinum crucible in a CZ furnace.The key process parameters such as pulling rate,rotation rate and power of 4 in optical grade lithium niobate crystal were synchronously recorded together with the intrinsic growth interface electromotive force(GEMF),thereby establishing a quantitative correlation between GEMF signals and heat-mass transport.This approach enabled in-situ detection and real-time feedback control of interface instabilities,including temperature fluctuations and interface inversion,during the shoulder growth stage.The seed temperature(Ts)and crucible temperature(Tl)were monitored by thermocouples connected to a model Eurotherm 2404 thermometer(±0.1℃).Platinum wires were employed as leads and electrodes,with a positive electrode affixed to the seed and a negative electrode to the base of the platinum crucible.The GEMF between the growing crystal and the melt was measured by a model Keithley 2100 micro-voltmeter(±0.1 µV). Results and discussion The pronounced interface fluctuations and the intense interface inversion during the shouldering stage phenomena that are difficult to detect using conventional methods can be clearly determined.The validation with extensive production data from large-size crystals demonstrates that compared with conventional detection techniques,GEMF can provide real-time and valuable information on the interface state.Furthermore,a quantitative relationship between GEMF deviation and crystal mass loss is established and a feedback strategy for regulating interface stability is proposed via integrating GEMF measurements with time-series analysis of crystal growth parameters. Based on real-time trajectory analysis of heat and mass transfer during interface inversion,a control criterion for maintaining stable interface growth is established.During LN crystal growth,the GEMF trajectory can evolve smoothly along the reference trend represented by the Seebeck baseline,avoiding sharp deviations.When the G-Ts curve exhibits a tendency to deviate from the Seebeck baseline,it indicates that interface inversion is imminent.At this stage,reducing the rotation rate or enhancing the radial temperature gradient can suppress interface inversion and stabilize crystal growth. Conclusions In this study,the growth interface electromotive force(GEMF)technique was combined with the key process parameters such as pulling rate,crystal rotation rate and heating power to enable the in-situ diagnostics of the 4-inch lithium niobate(LN)crystal growth process.The results showed that the supercooling electromotive force component of the GEMF signal could accurately reflect the periodic temperature fluctuations at the crystal growth interface,which were identified as the primary cause of diameter deviations during the constant-diameter stage.Furthermore,GEMF measurements precisely captured the interface flipping phenomenon during the shouldering process.The quantitative relationships among electrical signal deviation,temperature fluctuation,and mass response were elucidated via establishing a simplified one-dimensional heat-mass transport model for the boundary layer.Local fluctuations in heat flux could induce thermal-equilibrium shifts at the interface,thereby affecting crystallization rate and mass stability.Compared with conventional monitoring methods,the proposed model enabled real-time mapping from electrical signals to the physical growth state,providing an effective technical approach for elucidating interface instability mechanisms,predicting crystallization quality deviations,and constructing closed-loop feedback control systems for the interface.This methodology could have a significant promise for the controllable growth of large-size,high-quality crystals.关键词
铌酸锂/晶体生长/界面相本征电动势/原位诊断Key words
lithium niobate/crystal growth/interface electromotive force/in-situ diagnostics分类
数理科学引用本文复制引用
LI Sijin,YAN Jingyu,XIE Yixiao,ZHU Yunzhong..原位诊断4英寸铌酸锂晶体生长工艺过程的界面热输运[J].硅酸盐学报,2025,53(12):3435-3445,11.基金项目
国家自然科学基金(52372018). （52372018）
