光学精密工程2025，Vol.33Issue(22)：3525-3535,11.DOI:10.37188/OPE.20253322.3525
微型高精度光栅位移传感器设计及误差补偿
Miniature high-precision grating displacement sensor design and error compensation
摘要
Abstract
Displacement measurement at micro and nano scale holds paramount significance across do-mains such as mechanical precision machining,semiconductor manufacturing and industrial automation control.In comparison to traditional techniques,like potentiometer and laser interferometer,grating dis-placement measurement has the advantages of simple structure,high resolution and strong anti-electromag-netic interference ability,and has become the mainstream displacement measurement method in the field of precision measurement.However,most mature grating displacement sensors currently consist of measur-ing scales and reading heads,with large volumes and small ranges(low Range Length Ratio,RLR).For instance,the RLR of Keyence's GT2-S1 is only 0.033,which cannot meet the application requirements in confined space scenarios.In response to that challenge,this paper proposed and implemented a novel mi-cro grating displacement sensor,constructed a"W"-designing reflective folded optical path structure to compress the sensor's volume,integrated the sensor probe into the main body to achieve high RLR,and used the Particle Swarm Optimization(PSO)algorithm to identify and compensate for errors in photoelec-tric detection signals for high-precision measurement.After verification,the proposed sensor achieves a measuring range of 15 mm,an RLR of up to 0.6,and an error better than 1.1 μm when the volume is re-duced to 7 mm×8.5 mm×25 mm.The sensor features compact size,high RLR,superior accuracy,and easy multiplexing,providing an effective solution for online gap and displacement measurement in confined spaces.关键词
绝对式光栅位移传感器/微型化/位移测量/误差补偿/间隙测量Key words
absolute grating displacement sensor/miniaturization/displacement measurement/error compensation/gap measurement分类
信息技术与安全科学引用本文复制引用
LI Ziwen,ZHAO Maozhong,DU Wei,WU hao,WANG Jindong,ZHU Tao..微型高精度光栅位移传感器设计及误差补偿[J].光学精密工程,2025,33(22):3525-3535,11.基金项目
国家自然科学基金(No.62475026,No.62205036,No.62075021) （No.62475026,No.62205036,No.62075021）
国家重点研发计划(No.2023YFF0715700) （No.2023YFF0715700）
