表面技术2025，Vol.54Issue(24)：27-49,23.DOI:10.16490/j.cnki.issn.1001-3660.2025.24.002
超快激光玻璃微纳加工技术进展与应用
Advances and Applications of Ultrafast Laser Glass Micro/Nanofabrication Technology
摘要
Abstract
Glass materials are of significant values in high-tech fields such as photovoltaics,biomedicine,microelectro-mechanical systems(MEMS),and optical data storage,owing to their exceptional optical transparency,insulation properties,and chemical stability.The expanding demands of these fields continually push the requirements for precision,feature miniaturization,and functional integration in glass components.However,their inherent high hardness and brittleness pose severe challenges for high-precision manufacturing.Conventional mechanical processing and long-pulse laser machining are often accompanied by inevitable defects such as micro-cracks,debris,a substantial heat-affected zone(HAZ),and stress concentration,which significantly degrades the performance and service life of glass components.In contrast,ultrafast laser technology,with pulse widths in the femtosecond-to-picosecond range and ultra-high peak power densities,offers a revolutionary solution to glass processing.Relying on nonlinear absorption mechanisms,it enables high-precision,low-damage"cold"processing,thereby effectively suppressing thermal diffusion and collateral damage.The unique light-matter interaction,which confines energy deposition spatially and temporally,is the fundamental reason for its superior capabilities compared to conventional methods. The work aims to systematically review recent advances in ultrafast laser-based micro/nanofabrication of glass.Firstly,the mechanisms underlying the interaction between ultrafast lasers and glass are outlined.The process originates from nonlinear excitation(multiphoton and tunneling ionization)and avalanche ionization,followed by energy relaxation via multi-timescale electron-phonon coupling.This mechanism allows the laser energy to be confined precisely within the focal volume,enabling high-precision,high-quality surface processing or internal modification.A clear understanding of this multi-stage process is crucial for rationally designing and optimizing laser parameters for specific material modifications. Then,a comprehensive analysis of key processing techniques developed to overcome the limitations of conventional Gaussian-beam single-spot processing is provided.In terms of temporal shaping,double-pulse and burst-mode strategies are discussed.By adjusting pulse delay and energy distribution,these approaches can suppress plasma-shielding effects and improve the management of heat accumulation,thus enhancing ablation efficiency and welding quality.With respect to spatial shaping,the review covers multi-focus processing and the use of structured light fields(e.g.,Bessel and Airy beams).These methods attract considerable attention for enabling high-throughput parallel processing,high-aspect-ratio drilling,and curved cutting.The flexibility provided by beam shaping is the key to translating the fundamental advantages of ultrafast lasers into versatile and practical fabrication tools.To overcome the diffraction limit,three super-resolution strategies,including near-field processing,far-field-induced near-field processing,and pure far-field processing,are examined,with an explanation of how they achieve feature sizes well below the diffraction limit.Furthermore,hybrid methods that combine ultrafast lasers with chemical etching or other laser sources are presented as a means to extend processing capabilities,allowing the fabrication of complex 3D structures and efficient drilling.This synergy often combines the precision of ultrafast lasers with the selectivity or speed of a secondary process,opening new avenues for complex microstructure fabrication. Finally,specific applications of these techniques in cutting-edge fields are detailed.In photovoltaics,ultrafast lasers are used to create high-quality holes in double-glass modules and to texture surfaces for self-cleaning functionality.In biomedicine,they enable the fabrication of integrated microfluidic chips and highly sensitive surface plasmon resonance(SPR)sensors.For MEMS,the technology supports precision machining and frequency tuning of quartz resonators without damaging the crystal lattice.In data storage,it has made possible high-density,permanent five-dimensional optical storage.The review concludes by summarizing current challenges,such as the trade-off between processing efficiency and accuracy,and outlines future directions aimed at deepening mechanistic understanding,implementing intelligent process control,and advancing toward adaptive ultrafast laser manufacturing.关键词
超快激光/玻璃加工/时空整形/非线性光学/微纳加工Key words
ultrafast laser/glass processing/spatiotemporal shaping/nonlinear optics/micro/nanofabrication分类
信息技术与安全科学引用本文复制引用
陈依兰,吉鹏飞,鲁意博,田梦瑶,赵亮,陈博,李欣..超快激光玻璃微纳加工技术进展与应用[J].表面技术,2025,54(24):27-49,23.基金项目
深圳市承接国家重大专项(CJGJZD202407293000247) （CJGJZD202407293000247）
基础科学中心项目(52488301)Shenzhen Science and Technology Programs(CJGJZD202407293000247) （52488301）
Basic Sciences Center Program(52488301) （52488301）
