表面技术2025，Vol.54Issue(24)：50-69,20.DOI:10.16490/j.cnki.issn.1001-3660.2025.24.003
激光制备吸液芯表面热功能结构研究进展
Research Progress on Laser Fabrication of Thermal Functional Surface Structures for Wicks
摘要
Abstract
With the rapid advancement of portable electronic products toward high integration,superior performance,and extreme miniaturization,chip power consumption has continued to escalate,leading to significantly increased localized heat fluxes and increasingly severe thermal hotspot challenges.Currently,two-phase heat transfer technology based on the latent heat of working fluids has emerged as a pivotal strategy for high-heat-flux dissipation.As a representative two-phase cooling device,the vapor chamber(VC)facilitates high-efficiency heat spreading through a vapor-liquid phase-change cycle.However,the aggressive compression of internal space in ultra-thin VCs drastically escalates fluidic flow resistance and weakens overall heat transfer performance.As the core component providing the necessary capillary driving force for liquid return,the wick must be engineered with micro-and nano-scale architectures to achieve a high capillary limit,thereby satisfying the escalating cooling demands of next-generation electronics. Laser micro-nano processing,characterized by its ultra-high peak power density,negligible heat-affected zone,and exceptional control over multi-scale morphologies,has become an indispensable methodology for wick fabrication.This technique enables the in-situ fabrication of hierarchical structures directly on metallic substrates,effectively reconciling the inherent contradiction between high capillary pressure and favorable permeability.The work aims to provide a systematic review of Chinese and international research progress in functional wick surfaces,specifically focusing on the application status of laser micro-nano processing in the preparation of advanced thermal structures. A detailed analysis is provided regarding the modulation mechanisms of key process parameters,including laser energy density,scanning strategies,pulse repetition rates,and hatching distances,on the evolution of micro-nano topographies and surface wettability.The review elucidates the synergistic optimization mechanism of hierarchical structures,where micro-scale features serve as low-resistance conduits for bulk liquid transport,while sub-micron textures provide the necessary interfacial curvature to maximize capillary lift.Furthermore,the underlying physical principles of enhanced phase-change heat transfer are revealed,detailing how laser-engineered surfaces promote thin-film evaporation,increase the density of active nucleation sites,and delay the"dry-out"phenomenon at high heat fluxes. Through a rigorous comparative analysis between laser micro-nano processing and conventional techniques,such as additive manufacturing,electrochemical deposition,chemical etching,and traditional mechanical micro-machining,the superior advantages of laser technology in terms of fabrication precision,multi-scale controllability,and integration adaptability are demonstrated.Specifically,traditional mechanical micro-processing,such as mechanical scribing,is typically restricted to producing large-scale features(often 100 μm and above),and the significant mechanical stress exerted during the process renders ultra-thin substrates highly susceptible to undesirable deformation.While chemical etching is capable of producing micron-scale grooves,its practical deployment is severely hindered by low processing efficiency,substantial environmental pollution due to toxic byproducts,and poor control over dimensional precision.In contrast,leveraging its non-contact and high-energy-density characteristics,laser micro-nano processing enables the in-situ fabrication and monolithic integration of complex wick patterns without compromising the mechanical integrity of thin metallic shells.The focus is placed on the unique capability of laser technology to overcome the stringent fabrication constraints within ultra-thin cavities(≤1.0 mm),ensuring both high geometric fidelity and structural robustness. Addressing engineering bottlenecks such as large-area processing consistency,long-term operational reliability under repeated thermal cycling,and compatibility across diverse material systems,the potential technical evolution paths are investigated,such as hybrid manufacturing combining laser ablation with chemical etching or oxidation.Finally,the prospects of laser micro-nano processing in the domain of high-performance and flexible phase-change heat dissipation devices are envisioned.This review aims to provide a comprehensive theoretical framework and practical process references for the research and development of next-generation thermal management systems in the electronics industry.关键词
激光加工/表面热功能结构/相变传热/吸液芯/均热板Key words
laser processing/thermal functional surface structures/phase-change heat transfer/wick/vapor chamber分类
航空航天引用本文复制引用
贾友凯,曹佐,钟文洲,王纪祥,黄亚军,谢小柱..激光制备吸液芯表面热功能结构研究进展[J].表面技术,2025,54(24):50-69,20.基金项目
广东省重点研发项目(2023B0909030003-3) （2023B0909030003-3）
广州市科技计划项目(2025A04J3758) （2025A04J3758）
国家自然科学基金(52075103)Guangdong Provincial Key R&D Program(2023B0909030003-3) （52075103）
Research Plan Guangzhou Science and Technology Bureau(2025A04J3758) （2025A04J3758）
National Natural Science Foundation of China(52075103) （52075103）
