光通信技术2025，Vol.49Issue(6)：8-14,7.DOI:10.13921/j.cnki.issn1002-5561.2025.06.002
高调制效率的薄膜铌酸锂电光调制器设计
Design of thin-film lithium niobate electro-optic modulator with high modulation efficiency
李海盛 1宋树祥 1尹怡辉 2谢仕锋 2杨万里 2李跃 2杨佳宇 2熊斌1
作者信息
- 1. 广西师范大学 电子与信息工程学院,广西 桂林 541004||广西师范大学 集成电路学院,广西 桂林 541004
- 2. 中国电子科技集团公司 第三十四研究所,广西 桂林 541004
- 折叠
摘要
Abstract
To overcome the trade-off among efficiency,loss,and bandwidth in thin-film lithium niobate(TFLN)electro-optic modulators,a high-efficiency TFLN modulator is designed.By embedding a SiO₂ protective layer and a BaTiO₃ high-dielectric cladding between the waveguide and electrodes,along with a precisely designed dual-capacitance structure,the electric field is enhanced while optical loss is suppressed.Simulation results demonstrate that the electro-optic modulation bandwidth of this structure exceeds 60 GHz,with an optical loss of less than 0.2 dB/cm and a half-wave voltage-length product of 1.42 V·cm.关键词
光芯片/电光调制器/薄膜铌酸锂/高调制效率/有限元分析Key words
optical chip/electro-optical modulator/thin film lithium niobate/high modulation efficiency/finite element analysis分类
信息技术与安全科学引用本文复制引用
李海盛,宋树祥,尹怡辉,谢仕锋,杨万里,李跃,杨佳宇,熊斌..高调制效率的薄膜铌酸锂电光调制器设计[J].光通信技术,2025,49(6):8-14,7.
