测试技术学报2025，Vol.39Issue(6)：654-661,8.DOI:10.62756/csjs.1671-7449.2025078
基于调频原子力显微镜的悬臂模型与控制系统仿真
Simulation of Cantilever Model and Control System Based on Frequency-Modulated Atomic Force Microscopy
摘要
Abstract
To address the constant amplitude and constant frequency vibration control problem of the frequency-modulated atomic force microscope cantilever in operation,this paper aims to further optimize the cantilever control system structure.Based on the probe's equation of motion and relevant structural parameters,a cantilever structural model was established.On this basis,a control loop was designed,integrating self-excited oscillation,phase-locked loop demodulation,and automatic gain control technol-ogy.The control loop consists of a phase-locked control loop and an amplitude-driven control loop,and the Simulink environment was used for modeling and simulating the cantilever and its control system.Simulation results show that the control system can stabilize the cantilever amplitude measurement signal at the set value of 5 nm within 4 ms,while maintaining the cantilever vibration frequency at 160 kHz(the resonance frequency of the drive mode).Furthermore,this paper investigates the effect of loop filter parameters in the phase-locked control loop on steady-state phase difference and frequency capture,laying the foundation for further improvements in the FM-AFM cantilever control system.关键词
调频原子力显微镜/恒幅恒频/悬臂模型/Simulink模型Key words
frequency-modulated atomic force microscopy/constant-amplitude and constant-frequency/cantilever model/Simulink module分类
机械制造引用本文复制引用
曾德超,姚志飞,孙秋园,赵波慧,田馨,马宗敏..基于调频原子力显微镜的悬臂模型与控制系统仿真[J].测试技术学报,2025,39(6):654-661,8.基金项目
国家重点研发计划资助项目(2022YFC2204104) （2022YFC2204104）
国家自然科学基金国际合作与交流项目(62220106012) （62220106012）
山西省杰出青年基金项目(202103021221007) （202103021221007）
