光学精密工程2025，Vol.33Issue(23)：3593-3617,25.DOI:10.37188/OPE.20253323.3593
宽波段光栅国内外研究综述
Review of domestic and international research on broadband gratings
摘要
Abstract
Diffraction gratings serve as the core optical components in spectroscopic instrumentation.Broadband gratings,in contrast to conventional gratings,fulfill spectral analysis requirements across ex-tended wavelength ranges.This paper reviews four principal types of broadband gratings:complex groove-shaped gratings,zoned gratings,intermediate-step gratings,and multilayer dielectric gratings.Their re-spective structures and operational principles are introduced,accompanied by a summary of recent research progress.Key characteristics are delineated as follows:complex groove-shaped gratings exhibit high spec-tral continuity and stable diffraction efficiency,yet their performance is highly sensitive to fabrication preci-sion;zoned gratings offer considerable design flexibility and benefit from mature processing techniques,but suffer from phase mismatch,diffraction field disparities between sub-zones,and susceptibility to stray light;intermediate-step gratings enable high-resolution response over broad wavelength ranges at high dif-fraction orders,though their accuracy is constrained by manufacturing equipment and process complexity;multilayer dielectric gratings provide adaptable structural design and strong environmental adaptability,but impose stringent demands on material selection and multilayer film thickness control.Finally,future devel-opment directions for broadband diffraction gratings are outlined to inform subsequent research.关键词
光谱仪/宽波段光栅/衍射光栅/闪耀光栅/中阶梯光栅Key words
spectrometer/broadband grating/diffraction grating/blaze grating/echelle grating分类
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CHEN Pengyuan,MI Xiaotao,LI Shuo,JIANG Sibo,ZHOU Jingxuan..宽波段光栅国内外研究综述[J].光学精密工程,2025,33(23):3593-3617,25.基金项目
国家重点研发计划资助项目(No.2023YFF0714802) （No.2023YFF0714802）
