光学精密工程2025，Vol.33Issue(23)：3658-3671,14.DOI:10.37188/OPE.20253323.3658
基于相位测量偏折术的复杂曲面测量系统
Complex surface measurement system based on phase measuring deflectometry technique
摘要
Abstract
To enable high-precision measurement of complex surfaces,a fringe reflection measurement system based on phase measuring deflectometry was developed.The study addressed the system's struc-tural design,calibration procedures,and metrology algorithms for a configuration comprising a camera,a display screen,and the tested object.High-performance display screens and cameras were selected accord-ing to the object's size and surface geometry.Instrument-specific calibrations were performed for the cho-sen display and camera,and the spatial relationships among the three components were established using a high-precision articulated-arm measuring device.System calibration was completed by combining comput-er-aided optimization with CODE V simulation analysis.Finally,an integral reconstruction algorithm was implemented to obtain high-precision surface measurements.Experimental results indicate that the pro-posed system achieves measurement performance comparable to LUPHOScan and ZYGO&CGH,with wavefront RMS accuracy exceeding λ/50.The system features a simple architecture,large dynamic range,and strong immunity to interference,thereby enhancing measurement efficiency and accuracy for complex surfaces and satisfying industrial processing and assembly requirements while improving equip-ment performance.关键词
光学测量/复杂曲面/条纹反射/相位测量偏折术/积分重构Key words
optical metrology/complex surface/fringe reflection/phase measuring deflectometry/inte-gral reconstruction分类
数理科学引用本文复制引用
XU Zhiqiang,WANG Jianli,LI Hongzhuang,MA Xinxue..基于相位测量偏折术的复杂曲面测量系统[J].光学精密工程,2025,33(23):3658-3671,14.基金项目
国家重点研发计划资助项目(No.2023YFF0722900) （No.2023YFF0722900）
国家自然科学基金资助项目(No.62305327,No.62105327) （No.62305327,No.62105327）
