摩擦(英文)2025,Vol.13Issue(12):1-18,18.DOI:10.26599/FRICT.2025.9441048
Electronics manufacturing tribology:Future opportunities and challenges
Electronics manufacturing tribology:Future opportunities and challenges
摘要
关键词
electronics manufacturing/tribology/advanced chip/atomic manufacturingKey words
electronics manufacturing/tribology/advanced chip/atomic manufacturing引用本文复制引用
Jie Cheng,Shuo Gao,Jiahui Ma,Zhenxiang Huang,Shirong Ge..Electronics manufacturing tribology:Future opportunities and challenges[J].摩擦(英文),2025,13(12):1-18,18.基金项目
The work was supported by the National Natural Science Foundation of China(No.52075037),the Beijing Municipal Natural Science Foundation(No.3222017),the State Key Laboratory of Tribology in Advanced Equipment(No.SKLTKF21A01),and the Fundamental Research Funds for the Central Universities(No.2024ZKPYJD09). (No.52075037)