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Electronics manufacturing tribology:Future opportunities and challenges

Jie Cheng Shuo Gao Jiahui Ma Zhenxiang Huang Shirong Ge

摩擦(英文)2025,Vol.13Issue(12):1-18,18.
摩擦(英文)2025,Vol.13Issue(12):1-18,18.DOI:10.26599/FRICT.2025.9441048

Electronics manufacturing tribology:Future opportunities and challenges

Electronics manufacturing tribology:Future opportunities and challenges

Jie Cheng 1Shuo Gao 1Jiahui Ma 1Zhenxiang Huang 1Shirong Ge1

作者信息

  • 1. School of Mechanical and Electrical Engineering,China University of Mining and Technology-Beijing,Beijing 100083,China
  • 折叠

摘要

关键词

electronics manufacturing/tribology/advanced chip/atomic manufacturing

Key words

electronics manufacturing/tribology/advanced chip/atomic manufacturing

引用本文复制引用

Jie Cheng,Shuo Gao,Jiahui Ma,Zhenxiang Huang,Shirong Ge..Electronics manufacturing tribology:Future opportunities and challenges[J].摩擦(英文),2025,13(12):1-18,18.

基金项目

The work was supported by the National Natural Science Foundation of China(No.52075037),the Beijing Municipal Natural Science Foundation(No.3222017),the State Key Laboratory of Tribology in Advanced Equipment(No.SKLTKF21A01),and the Fundamental Research Funds for the Central Universities(No.2024ZKPYJD09). (No.52075037)

摩擦(英文)

2223-7690

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