真空电子技术Issue(6)：20-25,6.DOI:10.16540/j.cnki.cn11-2485/tn.2025.06.04
微纳光控真空晶体管太赫兹辐射源机理及工艺探索研究
Study on Mechanism and Process of Micro/Nano Optical-Controlled Vacuum Transistor Terahertz Radiation Sources
摘要
Abstract
As core components of terahertz(THz)technology application systems,the miniaturized high-pow-er terahertz radiation sources demonstrate broad application prospects in numerous military and civilian fields,in-cluding radar detection and security inspection imaging.A novel micro/nano optical-controlled vacuum transistor terahertz radiation source is introduced,which integrates the technical advantages of vacuum electronics,semicon-ductor electronics and optoelectronics,exhibiting unique merits in achieving high-power continuous-wave(CW)ra-diation across an ultra-broadband spectrum.The operating mechanism of this novel terahertz device is elucidated.To address critical technical challenges in high-precision micro/nano fabrication,exploratory research is conducted on the fabrication processes of its core components.By employing MEMS micro/nano fabrication techniques,inclu-ding ultraviolet(UV)lithography,electron-beam evaporation,and plasma etching,the miniaturized terahertz anten-na and vacuum channel arrays are successfully fabricated.The processing error of the antenna is within±0.664 μm.The measured reflection coefficient and input impedance show good agreement with the simulation results.The re-flection coefficient|S11|remains below-10 dB across the frequency range of 36.3～100 GHz.The measured etch-ing depth of the vacuum channel is consistent with the designed value of 5 μm.The experimental results verify the feasibility of the process and lay the foundation for the overall processing of terahertz radiation sources.The micro/nano optical controlled transistor terahertz radiation sources not only provide a promising new technological path,but also have the potential to become miniaturized high-power terahertz radiation sources.关键词
太赫兹辐射源/真空晶体管/太赫兹天线/微纳加工Key words
Terahertz radiation source/Vacuum transistor/Terahertz antenna/Micro/nano fabrication分类
信息技术与安全科学引用本文复制引用
SHI Bin-bin,SHU Guo-xiang,LI Xin-qiang,HONG Sheng-tao,HUANG Long-shen,RUAN Cun-jun,HE Wen-long..微纳光控真空晶体管太赫兹辐射源机理及工艺探索研究[J].真空电子技术,2025,(6):20-25,6.基金项目
广东省自然科学基金—杰出青年项目基金(2025B1515020006),深圳市海外高层次人才团队项目(KQTD20200820113046084) （2025B1515020006）
