华侨大学学报（自然科学版）2026，Vol.47Issue(1)：20-27,8.DOI:10.11830/ISSN.1000-5013.202507035
基于多树遗传编程的存储仓与组合设备集成系统优化
Optimization of Scheduling for Stocker-Integrated Cluster Tools via Multi-Tree Genetic Programming
摘要
Abstract
To address the complex scheduling problem of stocker-integrated cluster tools under frequent recipe switching in advanced semiconductor manufacturing,a multi-tree genetic programming method is proposed with the optimization objective of minimizing the makespan.Considering multiple practical constraints,inclu-ding recipe switching,chamber cleaning,stocker capacity,and robot-handling operations,several representa-tive operating scenarios are constructed to verify the effectiveness of the proposed method.The experimental framework adopts a dual-tree structure:one syntax tree determines the wafer lot entry sequence,while the other specifies the assignment strategy of processing chambers.The two syntax trees are jointly optimized through a cooperative co-evolution mechanism,achieving a favorable balance between search efficiency and so-lution quality.The proposed method is evaluated on three representative case studies and compared with manu-ally designed scheduling rules.The experimental results show that the proposed method demonstrates superior scheduling performance and robustness across different operating conditions,reducing the average makespan by approximately 25%-45%.关键词
组合设备/多树遗传编程/调度/半导体制造Key words
cluster tool/multi-tree genetic programming/scheduling/semiconductor manufacturing分类
信息技术与安全科学引用本文复制引用
陈良超,赖一铭,张思维,乔岩..基于多树遗传编程的存储仓与组合设备集成系统优化[J].华侨大学学报（自然科学版）,2026,47(1):20-27,8.基金项目
澳门科学技术发展基金资助项目(0011/2023/RIA1、0120/2024/RIA2) （0011/2023/RIA1、0120/2024/RIA2）
