金刚石与磨料磨具工程2025，Vol.45Issue(6)：807-815,9.DOI:10.13394/j.cnki.jgszz.2024.0149
工件旋转法磨削硬脆基片的表面粗糙度预测模型
Surface roughness prediction model for grinding hard-brittle substrates using workpiece rotation method
摘要
Abstract
Objectives:Workpiece rotation grinding has the advantages of high processing efficiency and controllable surface shape accuracy,and is the main method for thinning and flattening the back of hard-brittle substrates.The sur-face roughness is an important indicator for directly evaluating the grinding effect of workpieces,and controlling its value is crucial for improving the machining quality of workpieces.Methods:To predict the surface roughness of hard-brittle substrate workpieces using rotation grinding and optimize the grinding process,based on its kinematic model and the surface contour characteristics generated by the removal of brittle and plastic domain materials,the mathematical re-lationship model between grinding process parameters and grinding surface roughness is established using the indenta-tion fracture mechanics theory of hard-brittle materials and the abrasive grain cutting depth model as a bridge.The mod-el is analyzed and verified through grinding process experiments.Results:The results show that the established surface roughness model can be applied to both brittle removal and plastic removal for predicting grinding surface roughness.Conclusions:The overall error between the predicted surface roughness value of the model and the measured value of the grinding test is less than 25%,which can optimize the grinding process parameters of hard and brittle materials dur-ing workpiece rotation grinding.关键词
磨削/硬脆材料/表面粗糙度/磨粒切深Key words
grinding/hard and brittle materials/surface roughness/abrasive cutting depth分类
化学化工引用本文复制引用
张晓秋,王紫光,李哲辉,张昕,张瑜,李静,秦凤鸣,宋运运,师超钰..工件旋转法磨削硬脆基片的表面粗糙度预测模型[J].金刚石与磨料磨具工程,2025,45(6):807-815,9.基金项目
辽宁省科技厅博士科研启动基金计划项目(2023-BS-171) （2023-BS-171）
河南省科技攻关项目(232102230145). （232102230145）
