首页|期刊导航|半导体学报（英文版）|Evolution of diamond film growth modes under varied plasma conditions:insights from optical emission spectroscopy

Evolution of diamond film growth modes under varied plasma conditions:insights from optical emission spectroscopy

Pengfei Qu Guangdi Zhou Peng Jin Xu Han Zhanguo Wang

半导体学报（英文版）2026，Vol.47Issue(1)：90-97,8.

半导体学报（英文版）2026，Vol.47Issue(1)：90-97,8.DOI:10.1088/1674-4926/25110003

Evolution of diamond film growth modes under varied plasma conditions:insights from optical emission spectroscopy

Pengfei Qu ¹Guangdi Zhou ¹Peng Jin ²Xu Han ¹Zhanguo Wang²

作者信息

1. Laboratory of Solid-State Optoelectronic Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
2. Laboratory of Solid-State Optoelectronic Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
折叠

摘要

关键词

heteroepitaxy/diamond films/growth modes/MPCVD/OES

Key words

heteroepitaxy/diamond films/growth modes/MPCVD/OES

引用本文复制引用

Pengfei Qu,Guangdi Zhou,Peng Jin,Xu Han,Zhanguo Wang..Evolution of diamond film growth modes under varied plasma conditions:insights from optical emission spectroscopy[J].半导体学报（英文版）,2026,47(1):90-97,8.

基金项目

This research was funded by the National Key Res-earch and Development Program of China(Grant No.2022YFB3608602),the National Natural Science Foundation of China(Grant Nos.62404215 and 62574199)and Instru-ment and Equipment Development Project of CAS(Grant No.PTYQ2024TD0003). （Grant No.2022YFB3608602）

半导体学报（英文版）

ISSN：1674-4926

访问量0

下载量0

段落导航