光学精密工程2026，Vol.34Issue(1)：112-123,12.DOI:10.37188/OPE.20263401.0112
跨尺度驱动纵切模态压电电机设计与实验
Design and experiment on longitudinal-shearing mode piezoelectric motor driven by cross-scale forces
摘要
Abstract
To overcome the limitation of existing piezoelectric motors in simultaneously achieving high-speed motion and high-resolution positioning,a cross-scale longitudinal-shearing hybrid vibration piezo-electric motor was designed.Dual-mode operation in quasi-static and resonant states was implemented to satisfy the combined requirements of speed and precision in precision-drive applications.The stator inte-grates a longitudinal vibration transducer driven by the piezoelectric d33 effect and a sandwiched shear trans-ducer driven by the d15 effect.Elliptical motion at the driving foot is generated by orthogonal vibrations at identical frequencies.Key parameters were optimized via finite-element simulation(COMSOL).For qua-si-static operation,the primary hinge stiffness was set to 16.66 N/μm to improve displacement output effi-ciency;for resonant operation,structural parameters were tuned to achieve modal degeneration of the lon-gitudinal(7 829.6 Hz)and bending(7 860.7 Hz)vibrations.The experiments showed that under quasi-static excitation(800 Hz,preload 0.38 N),a minimum displacement resolution of 39 nm and a maximum speed of 0.95 mm/s were achieved.Under resonant excitation(6 780 Hz,30° phase difference),a maxi-mum no-load speed of 125.33 mm/s and a peak load capacity of 0.45 N were obtained.The proposed mo-tor outperforms conventional single-mode piezoelectric motors in both speed(125.33 mm/s)and resolu-tion(39 nm),effectively mitigating the intrinsic trade-off between high speed and high precision and pro-viding a practical solution for cross-scale precision positioning drives.关键词
压电电机/纵切模态/跨尺度驱动/压电陶瓷/准静态Key words
piezoelectric motor/longitudinal-shearing mode/cross-scale driving/piezoelectric ceramics/quasi-static分类
信息技术与安全科学引用本文复制引用
曾思哲,冯耀辉,王浩然,王雅,李瑞君,潘巧生..跨尺度驱动纵切模态压电电机设计与实验[J].光学精密工程,2026,34(1):112-123,12.基金项目
国家自然科学基金面上资助项目(No.52175533) （No.52175533）
安徽省科技攻坚重点资助项目(No.202423i08050021) （No.202423i08050021）
合肥市自然科学基金资助项目(No.HZR2439) （No.HZR2439）
中央高校基本科研业务资助项目(No.JZ2025HGJG0273) （No.JZ2025HGJG0273）
中央高校基本科研业务资助项目(No.PA202511SL0102) （No.PA202511SL0102）
