Optical design of wide-field and broadband light field camera for high-precision optical surface defect detection
Chengchen Zhou Yukun Wang Yue Ding Dacheng Wang Jiucheng Nie Jialong Li Zhixi Li Zheng Zhou Shuangshuang Zhang Xiaokun Wang
Optical design of wide-field and broadband light field camera for high-precision optical surface defect detection
摘要
关键词
Optical design/Defect detection/Wide-field camera/Broadband light field camera分类
信息技术与安全科学引用本文复制引用
Chengchen Zhou,Yukun Wang,Yue Ding,Dacheng Wang,Jiucheng Nie,Jialong Li,Zhixi Li,Zheng Zhou,Shuangshuang Zhang,Xiaokun Wang..Optical design of wide-field and broadband light field camera for high-precision optical surface defect detection[J].Astronomical Techniques and Instruments,2026,3(1):P.64-74,11.基金项目
supported by the Jilin Science and Technology Development Plan(20240101029JJ) (20240101029JJ)
the following study:synchronized high-speed detection of surface shape and defects in the grinding stage of complex surfaces(KLMSZZ202305) (KLMSZZ202305)
for the high-precision wide dynamic large aperture optical inspection system for fine astronomical observation by the National Major Research Instrument Development Project(62127901) (62127901)
for ultrasmooth manufacturing technology of large diameter complex curved surface by the National Key R&D Program(2022YFB3403405) (2022YFB3403405)
for research on the key technology of rapid synchronous detection of surface shape and subsurface defects in the grinding stage of large diameter complex surfaces by the International Cooperation Project(2025010157) (2025010157)
The Key Laboratory of Optical System Advanced Manufacturing Technology,Chinese Academy of Sciences(2022KLOMT02-04)also supported this study. (2022KLOMT02-04)