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On-line detection of additive concentrations in acidic copper plating solution for metal interconnection by an electrochemical microfluidic workstation

Yi Zhao Ju-Xing Zeng Jia-Qiang Yang Tao Song Ren Hu Jian-Jia Su Bo Zhang Fang-Zu Yang Dongping Zhan Lianhuan Han

Industrial Chemistry & Materials2025，Vol.3Issue(5)：P.607-617,11.

Industrial Chemistry & Materials2025，Vol.3Issue(5)：P.607-617,11.DOI:10.1039/d5im00073d

On-line detection of additive concentrations in acidic copper plating solution for metal interconnection by an electrochemical microfluidic workstation

Yi Zhao ¹Ju-Xing Zeng ²Jia-Qiang Yang ³Tao Song ¹Ren Hu ⁴Jian-Jia Su ⁴Bo Zhang ⁵Fang-Zu Yang ³Dongping Zhan ³Lianhuan Han⁵

作者信息

1. State Key Laboratory of Physical Chemistry of Solid Surfaces,Xiamen University,Xiamen 361005,Fujian,China National Engineering Research Center of Chemicals for Electronic Manufacturing(Reconstruction),Xiamen University,Xiamen 361005,Fujian,China Engineering Research Center of Electrochemical Technologies of Ministry of Education,Xiamen 361005,Fujian,China Department of Chemistry,College of Chemistry and Chemical Engineering,Xiamen University,Xiamen 361005,Fujian,China Discipline of Intelligent Instrument and Equipment,Xiamen University,Xiamen 361005,Fujian,China
2. State Key Laboratory of Physical Chemistry of Solid Surfaces,Xiamen University,Xiamen 361005,Fujian,China Department of Chemistry,College of Chemistry and Chemical Engineering,Xiamen University,Xiamen 361005,Fujian,China
3. State Key Laboratory of Physical Chemistry of Solid Surfaces,Xiamen University,Xiamen 361005,Fujian,China National Engineering Research Center of Chemicals for Electronic Manufacturing(Reconstruction),Xiamen University,Xiamen 361005,Fujian,China Engineering Research Center of Electrochemical Technologies of Ministry of Education,Xiamen 361005,Fujian,China Department of Chemistry,College of Chemistry and Chemical Engineering,Xiamen University,Xiamen 361005,Fujian,China
4. National Engineering Research Center of Chemicals for Electronic Manufacturing(Reconstruction),Xiamen University,Xiamen 361005,Fujian,China Department of Chemistry,College of Chemistry and Chemical Engineering,Xiamen University,Xiamen 361005,Fujian,China
5. State Key Laboratory of Physical Chemistry of Solid Surfaces,Xiamen University,Xiamen 361005,Fujian,China Department of Mechanical and Electrical Engineering,Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen University,Xiamen 361005,Fujian,China
折叠

摘要

关键词

Electrochemical microfluidic workstation/On-line detection of additive concentration/Microfluidic chip/Ultramicroelectrode/Acidic copper electroplating

分类

化学化工

引用本文复制引用

Yi Zhao,Ju-Xing Zeng,Jia-Qiang Yang,Tao Song,Ren Hu,Jian-Jia Su,Bo Zhang,Fang-Zu Yang,Dongping Zhan,Lianhuan Han..On-line detection of additive concentrations in acidic copper plating solution for metal interconnection by an electrochemical microfluidic workstation[J].Industrial Chemistry & Materials,2025,3(5):P.607-617,11.

基金项目

the National Natural Science Foundation of China(22132003,22202166) （22132003,22202166）

National Key Research and Development Program of China(2023YFF0713900). （2023YFF0713900）

Industrial Chemistry & Materials

ISSN：2755-2608

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